ALD Al2O3 based nanolaminates for solar cell applications

Daniel K. Simon,Paul M. Jordan,Martin Knaut,Talha Chohan,Thomas Mikolajick,Ingo Dirnstorfer
DOI: https://doi.org/10.1109/pvsc.2015.7356401
2015-06-01
Abstract:Al2 O3 based nanolaminates provide new functionalities for silicon surface passivation layers in future high-efficient cell concepts. This work presents two different applications: (I) Symmetrical passivation layers for application on $p$- and n-type Si are realized with thin HfO2 and AI-doped SiO2 interface layers between Al2 O3 and Si. These stacks have excellent chemical passivation but zero fixed charges. Consequently, no surface inversion layer is formed in n-type Si and low surface recombination velocities below 2 cm/s are achieved in low injection. (II) Conductive passivation layers are realized with A12 O3-TiO2 double and multilayers. The optimum material combination and post deposition treatment results in a current density of 0.5 mA/cm2 at 10 mV with a surface recombination velocity of about 15 cm/s. This conductivity is more than eight orders of magnitude higher than for pure A12 O3.
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