Ferroelectric Undoped HfO x Capacitor With Symmetric Synaptic for Neural Network Accelerator

Jun-Dao Luo,Yu-Ying Lai,Kuo-Yu Hsiang,Chia-Feng Wu,Yun-Tien Yeh,Hao-Tung Chung,Yi-Shao Li,Kai-Chi Chuang,Wei-Shuo Li,Chun-Yu Liao,Pin-Guang Chen,Kuan-Neng Chen,Min-Hung Lee,Huang-Chung Cheng
DOI: https://doi.org/10.1109/ted.2021.3052428
IF: 3.1
2021-03-01
IEEE Transactions on Electron Devices
Abstract:A plasma-based ferroelectric undoped HfOx capacitor is fabricated using plasma-enhanced atomic layer deposition (PE-ALD), and the multilevel characteristics of synaptic behavior are investigated. A gradual ferroelectric phase transition in the material is confirmed by grazing incidence X-ray diffraction (GI-XRD) for different O2 plasma periods. The metal–ferroelectric–metal (MFM) capacitor presents excellent remnant polarization (${\text{P}}_{r}$ ) up to $13~\mu \text{C}$ /cm2 and a switching endurance of more than 108 cycles. Superior small potentiation/depression nonlinearity ($\alpha _{p}/\alpha _{d} = -0.08$ /−1.66 for voltage modulation stimulation) for synaptic training and almost symmetry training curve ($\vert \alpha _{p}$ -$\alpha _{d}\vert $ ) are obtained. High stability under multilevel operation with five consecutive cycles of alternating potentiation and depression is exhibited without significant polarization variation for each training step (pulse).
engineering, electrical & electronic,physics, applied
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