On the Air Buoyancy Effect in MEMS-Based Gravity Sensors for High Resolution Gravity Measurements

Xiaochao Xu,Qian Wang,Ji’ao Tian,Lujia Yang,Yanyan Fang,Qiu Wang,Chun Zhao,Fangjing Hu,Liangcheng Tu,Ji'ao Tian
DOI: https://doi.org/10.1109/jsen.2021.3106667
IF: 4.3
2021-10-15
IEEE Sensors Journal
Abstract:In this paper, the air buoyancy effect on Micro-Electro-MechanicalSystem (MEMS)-based gravity sensors for high-resolution gravity measurements is investigated. The MEMS gravimeter is operated in an atmospheric environment without any vacuum chamber; thus significantly simplifying the design, implementation and maintenance, and reducing the cost of the instrument. It is experimentally observed that the measured acceleration signal shows a clear correlation with the air buoyancy, and consequently the air pressure. A detailed theoretical model of the air buoyant force acting on the MEMS gravity sensor is proposed, giving a gravity-air pressure coefficient of 501.5 <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="3.37ex" height="1.676ex" style="vertical-align: -0.338ex;" viewBox="0 -576.1 1451 721.6" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use xlink:href="#MJMATHI-75" x="878" y="0"></use></g></svg></span> Gal/hPa for the silicon springmass system. After removing the error introduced by the air buoyant force, the MEMS gravity sensor exhibits an ultra-low self-noise floor of 1 <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="27.109ex" height="2.843ex" style="vertical-align: -0.838ex;" viewBox="0 -863.1 11672 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use xlink:href="#MJMATHI-75" x="878" y="0"></use><g transform="translate(1451,0)"> <use xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use xlink:href="#MJMATHI-61" x="878" y="0"></use> <use xlink:href="#MJMATHI-74" x="1408" y="0"></use> <use xlink:href="#MJMATHI-68" x="1769" y="0"></use> <use xlink:href="#MJMATHI-72" x="2346" y="0"></use> <use xlink:href="#MJMATHI-6D" x="2797" y="0"></use><g transform="translate(3676,0)"> <use xlink:href="#MJMATHI-47" x="0" y="0"></use> <use xlink:href="#MJMATHI-61" x="786" y="0"></use> <use xlink:href="#MJMATHI-6C" x="1316" y="0"></use></g></g> <use xlink:href="#MJMAIN-2F" x="6741" y="0"></use> <use xlink:href="#MJMATHI-73" x="7242" y="0"></use> <use xlink:href="#MJMATHI-71" x="7711" y="0"></use> <use xlink:href="#MJMATHI-72" x="8172" y="0"></use> <use xlink:href="#MJMATHI-74" x="8623" y="0"></use><g transform="translate(8985,0)"> <use xlink:href="#MJMATHI-72" x="0" y="0"></use> <use xlink:href="#MJMATHI-6D" x="451" y="0"></use> <use xlink:href="#MJMATHI-48" x="1330" y="0"></use> <use xlink:href="#MJMATHI-7A" x="2218" y="0"></use></g></g></svg></span> @1 Hz, as well as an excellent stability, with an Allan deviation of 3 <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="3.37ex" height="1.676ex" style="vertical-align: -0.338ex;" viewBox="0 -576.1 1451 721.6" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use xlink:href="#MJMATHI-75" x="878" y="0"></use></g></svg></span> Gal (40 s integration time). The sensor is capable of measuring the Earth tides in a 16-day span. 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engineering, electrical & electronic,instruments & instrumentation,physics, applied
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