Gas-Phase Synthesis of Iron Silicide Nanostructures Using a Single-Source Precursor: Comparing Direct-Write Processing and Thermal Conversion

Felix Jungwirth,Alba Salvador-Porroche,Fabrizio Porrati,Nicolas P. Jochmann,Daniel Knez,Michael Huth,Isabel Gracia,Carles Cané,Pilar Cea,José María De Teresa,Sven Barth,Carles Cané,José María De Teresa
DOI: https://doi.org/10.1021/acs.jpcc.3c08250
2024-03-07
The Journal of Physical Chemistry C
Abstract:The investigation of precursor classes for the fabrication of nanostructures is of specific interest for maskless fabrication and direct nanoprinting. In this study, the differences in material composition depending on the employed process are illustrated for focused-ion-beam- and focused-electron-beam-induced deposition (FIBID/FEBID) and compared to the thermal decomposition in chemical vapor deposition (CVD). This article reports on specific differences in the deposit composition and...
chemistry, physical,nanoscience & nanotechnology,materials science, multidisciplinary
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