Cantilever enhanced fiber-optic photoacoustic microprobe for diffusion detection of sulfur dioxide

Xinyu Zhao,Hongchao Qi,Zhengzhi Wang,Fengxiang Ma,Chenxi Li,Min Guo,Ke Chen
DOI: https://doi.org/10.1016/j.snb.2024.135340
IF: 9.221
2024-01-18
Sensors and Actuators B Chemical
Abstract:A cantilever enhanced fiber-optic photoacoustic microprobe with the cavity volume of only 119 μL is designed to detect SO 2 , which has the obvious advantages of passive sensing, anti-electromagnetic interference and low cost. A UV multi-mode fiber and a single-mode fiber are applied to transmit excitation light emitted by UV-LED and probe light, respectively. The lens assembly based on a collimating lens and a focusing lens is added to improve the light energy of UV-LED coupling into UV-fiber. Based on theoretical analysis and finite element method, a photoacoustic cavity with a radius of 1.5 mm and a length of 15 mm is designed, which is conducive to the realization of photoacoustic enhancement and rapid response at high frequencies. SO 2 gas diffuses into the PA cavity through a hole with the diameter of 0.5 mm and a gap of the cantilever with the width of 0.5 μm. A fiber-optic cantilever based on F-P interference is adopted to detect sound pressure. The frequency characteristic and response time of the sensor in different backgrounds of SF 6 and N 2 are analyzed experimentally. Compared with N 2 , the photoacoustic microprobe operates in SF 6 background with lower resonance frequency and longer response time, which is due to the high density and low thermal diffusivity of SF 6 gas. With the flow rate of 250 SCCM in the external cavity, the response time of the photoacoustic microprobe to SO 2 /SF 6 and SO 2 /N 2 are 96 s and 40 s, respectively. The detection limits of SO 2 in SF 6 and N 2 background are 35 ppb and 5 ppb, respectively.
chemistry, analytical,electrochemistry,instruments & instrumentation
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