Development and characterization of a novel RE 3+ doped Core-shell CeO 2 abrasive system and its glass CMP investigations

Zhuolun Li,Liangmao Jin,Zhiqiang Cao,Chong Zhang,Xin Cao,Gaorong Han,Shou Peng,Yong Liu

DOI: https://doi.org/10.1016/j.apsusc.2023.158055

IF: 6.7

2023-07-27

Applied Surface Science

Abstract:In recent years, Ultra-Thin Glass (UTG) has attracted substantial market attention due to its multi-scenario applications. One of the technical cores in UTG manufacturing is the abrasive design of the chemical mechanical polishing (CMP) process. The present work proposed rare-earth-doped core–shell structured 2 , 2 :La, and 2 :Yb abrasives synthesized by a low-temperature two-step method. The core–shell abrasives are large uniform nanospheres with a size of about 375 nm ∼ 450 nm. According to the matching effect of RE 3+ radii and defect sizes, La 3+ with larger radii exhibits a more substantial modulation effect than Yb 3+ upon the lattice distortion and Ce 3+ /Ce 4+ chemical shift. The CMP results revealed the superior polishing efficiency and better flattening ability of core–shell abrasives. The optimized 2 :La shows the best glass polishing ability ( MRR = 480.22 nm/min, Ra = 0.32 nm), which is attributed to the increased Ce 3+ composition from 9.79% to 28.14% (compared with the pristine 2 ) and large particle size, indicative of potential applications of novel abrasive systems in the field of glass polishing.

chemistry, physical,physics, applied, condensed matter,materials science, coatings & films