Study on uniform size and spherical CeO 2 abrasives synthesized by two-step method and their chemical mechanical polishing performances
Ning Xu,Yu Lin,Yuxin Luo,Jiahui Ma,Yu Huo,Kailong Gao,Ziheng Gao,Zhuo Wang
DOI: https://doi.org/10.1016/j.mssp.2024.108920
IF: 4.1
2024-10-04
Materials Science in Semiconductor Processing
Abstract:In this study, the synthesis of CeO 2 abrasives by two-step method was studied in detail and compared with one-step method. The micro-morphology, particle size and distribution of abrasives prepared by these two methods were studied. In addition, the chemical mechanical polishing performances of CeO 2 abrasives at different calcination temperatures were tested, including key parameters such as material removal rate (MRR) and surface roughness (Ra). The results show that the CeO 2 abrasives synthesized by one-step method are mainly spherical and irregular polyhedron, and the particle size is 678.85 nm when the calcination temperature is 800 °C. The concentration of oxygen vacancy and Ce 3+ is 13.06 % and 20.12 %, respectively. The highest MRR of quartz glass is 651.09 nm/min and the Ra is 0.52 nm. The CeO 2 abrasives prepared by two-step method are spherical with uniform particle size distribution, the particle size is 98.72 nm. The concentration of oxygen vacancy and Ce 3+ is 18.83 % and 24.97 %, respectively. The highest MRR of quartz glass is 626.97 nm/min and the Ra is 0.1363 nm. Compared with the one-step method, the surface roughness is reduced by 73.79 %. Appropriate abrasives size and uniform particle size distribution can improve the polishing quality of the workpiece. In this paper, it is considered that the two-step method is beneficial to control the morphology and size of CeO 2 abrasives, and provides conditions for the preparation of abrasives with uniform particle size distribution and spherical morphology, so as to improve the properties of chemical mechanical polishing materials.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied