Abstract:Photonic integrated circuits (PICs) based on lithographically patterned waveguides provide a scalable approach for manipulating photonic bits, enabling seminal demonstrations of a wide range of photonic technologies with desired complexity and stability. While the next generation of applications such as ultra-high speed optical transceivers, neuromorphic computing and terabit-scale communications demand further lower power consumption and higher operating frequency. Complementing the leading silicon-based material platforms, the third-generation semiconductor, silicon carbide (SiC), offers a significant opportunity toward the advanced development of PICs in terms of its broadest range of functionalities, including wide bandgap, high optical nonlinearities, high refractive index, controllable artificial spin defects and complementary metal oxide semiconductor-compatible fabrication process. The superior properties of SiC have enabled a plethora of nano-photonic explorations, such as waveguides, micro-cavities, nonlinear frequency converters and optically-active spin defects. This remarkable progress has prompted the rapid development of advanced SiC PICs for both classical and quantum applications. Here, we provide an overview of SiC-based integrated photonics, presenting the latest progress on investigating its basic optoelectronic properties, as well as the recent developments in the fabrication of several typical approaches for light confinement structures that form the basic building blocks for low-loss, multi-functional and industry-compatible integrated photonic platform. Moreover, recent works employing SiC as optically-readable spin hosts for quantum information applications are also summarized and highlighted. As a still-developing integrated photonic platform, prospects and challenges of utilizing SiC material platforms in the field of integrated photonics are also discussed.

Synthesis, structural features, and optical limiting application of silicon carbide nanoflakes

Nonlinear optical properties of 6H-SiC and 4H-SiC in an extensive spectral range

Strong third-order nonlinearity in amorphous silicon carbide waveguides

Nonlinear Regulation on Silicon Photonic Chips Based on Sb2Se3 Thin Films

Monolithic Silicon Carbide Metalenses

Structural evolution, interlayer coupling, band-gap, and optical properties of non-layered SiCNSs

One-dimensional SiC Nanostructures: Designed Growth, Properties, and Applications

Study on the Third-Order Nonlinear Enhancement of SiN Films

Heterogeneous integration of amorphous silicon carbide on thin film lithium niobate

Low-Dimensional Sic Nanostructures: Fabrication, Luminescence, and Electrical Properties

Novel Photonic Applications of Silicon Carbide

Nonlinear Third Order Silicon Photonics Enabled by Dispersion and Subwavelength Engineering

Interlayer coupling, electronic and optical properties of few-layer silicon carbide nanosheets

Nonlinear Optical Properties of Silicon Nanocrystals Grown by a SiOx/SiO2 Superlattice Approach

High-quality amorphous Silicon Carbide for hybrid photonic integration at low temperature

An integrated 3C-silicon carbide-on-insulator photonic platform for nonlinear and quantum light sources

Investigation of structural, linear, and nonlinear optical properties of Nanosized Zinc Oxide and Cadmium Oxide particles ingrained in Graphitic Carbon Nitrides

Silicon carbide for integrated photonics

High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature

Siloxene Nanosheets and Their Hybrid Gel Glasses for Broad-Band Optical Limiting

Soliton formation and spectral translation into visible on CMOS-compatible 4H-silicon-carbide-on-insulator platform