Electrical property-microstructure of copper interconnects printed by localized pulsed electrodeposition (l-PED)

Chao Wang,M. Josefina Arellano-Jimenez,Mohammad Waliullah,Manuel Quevedo-Lopez,Rodrigo Bernal,Majid Minary-Jolandan,Md Emran Hossain Bhuiyan
DOI: https://doi.org/10.1016/j.matlet.2022.133364
IF: 3
2022-10-24
Materials Letters
Abstract:Printing processes that enable printing high conductivity metals at small scale (<mm) ( l-PED) process, the pulsed voltage applied during metal printing allows control over the microstructure. In this article, we quantify the electrical resistivity of copper (Cu) interconnects printed by the l -PED process and correlate it with its microstructure. The results show a microstructure combined of nanotwinned (nt) grains and nanocrystalline (nc) grains, with an average grain size of 190 nm and twin thickness of ∼8 nm to ∼29 nm. The electrical resistivity was measured to be 8.25 μΩ.cm, which correlates with the observed microstructure and is remarkable for a printing process with no post-processing annealing done on the printed metal.
materials science, multidisciplinary,physics, applied
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