Abstract:Abstract A long sought objective of MEMS research within the oil & gas industry has been the realization of “FT-IR on a chip,” which could hold the potential to migrate laboratory grade chemical spectroscopy into downhole sensor suites. A fundamental obstacle to this research has been the cooling demands of conventional technologies which conflict with the miniaturized sensor volumes required in downhole logging systems and environmental conditions that routinely exceed 125 • C. Near centimeter scale spectroscopic devices are required by a majority of downhole sensor suites, which stands in stark contrast to multiple-decimeter size conventional devices. Here we report a near-centimeter scale FT-MIR ATR spectrometer compatible with downhole volumetric and temperature constraints. The spectrometer is based upon a high-temperature broadband mid-infrared metasurface detector/source combination derived from a geometric inversion of a set of conformal mapping contours. The metasurface elemental structure is derived from a geometric inversion of the canonical TanCirc conformal mapping contours and was found to exhibit a near zero index metamaterial (NZIM) behavior over a spectral range of interest for downhole chemical spectroscopy. The NZIM properties of the metasurface lead to an absorption phenomenon characterized by surface plasmon resonances which confine the absorption mechanism within the ultrathin (λ /300) metasurface plane and make the absorption properties of the microbolometer design relatively insensitive to the material properties of the remaining laminae. This unusual feature allows the metasurface to be integrated on a single VO 2 material thermometric layer and operated at elevated downhole temperatures despite corresponding to the VO2 metal-insulator-transition (MIT) region. Within this transition region however the VO2 layer exhibits a substantially beneficial property in that the VO 2 layer exhibits more than an order of magnitude enhancement in its ambient thermometric properties, leading to an uncooled microbolometer design with predicted maximum detectivity D * = 1.5 × 10 10 cm √ Hz/W and noise equivalent difference temperature NEDT of 1 mK at a modulation frequency of 500 Hz. A sub-millimeter scale thermal infrared source with intrinsic mid-infrared band-limited emission is formed from the same cellular geometric building block, enabling the spectrometer miniaturization. These performance parameters compare well with lower tier laboratory grade FT-MIR spectroscopic instruments and could represent a significant step in the effort towards deploying miniaturized high-temperature mid-infrared spectroscopy into oilfield downhole logging applications.

Multianalyte Detection with Metasurface-Based Midinfrared Microspectrometer

Multispectral Filters for MIR Spectral Imaging Applications

Miniature snapshot midinfrared spectrometer based on metal-insulator-metal metasurface

Smart mid-infrared metasurface microspectrometer gas sensing system

Mid-Infrared Sensor Based on a Suspended Microracetrack Resonator With Lateral Subwavelength-Grating Metamaterial Cladding

Miniaturized Spectroscopy System Based on a Semiconductor Nanofilm

Metasurface‐Enhanced Infrared Spectroscopy: An Abundance of Materials and Functionalities

Compact Mid‐Infrared Spectrometer Using Continuously Variable Infrared Filter and Microbolometer Array for Simple and Fast Measurement of Molecular Mid‐IR Spectra

Near Centimeter-scale FT-MIR Spectrometer based on NZIM Perfect Absorption using Inverted TanCirc Conformal Mapping Geometry

All-Dielectric High-Q Metasurfaces for Infrared Absorption Spectroscopy Applications

Non-polarized and Ultra-Narrow Band Filter in MIR Based on Multilayer Metasurface

Single-pixel reconstructive mid-infrared micro-spectrometer.

Integrated Photonics for Infrared Spectroscopic Sensing

Wavelength Multiplexing Infrared Metasurfaces for Protein Recognition and Trace Detection

Dual-band spatially-distinguishable metasurface thermal emitter for filterless mid-infrared gas sensing

Chip-scale sensor for spectroscopic metrology

Near-field resonant photon sorting applied: dual-band metasurface quantum well infrared photodetectors for gas sensing

High-Transmission Mid-Infrared Bandpass Filters Using Hybrid Metal-Dielectric Metasurfaces for CO2 Sensing

Compact angle-resolved metasurface spectrometer

Random broadband filters based on combination of metasurface and multilayer thin films for hyperspectral imaging

High-Sensitivity, High-Resolution Miniaturized Spectrometers for Ultraviolet to Near-Infrared Using Guided-Mode Resonance Filters