Abstract:Sequential infiltration synthesis (SIS) is a powerful approach for templated growth of solid materials such as oxides or metals that exploits the difference in interaction of a precursor molecule with a polymer or block copolymer. While there have been studies showing that infiltration of trimethyl-alumina (TMA) in polymers can be used to grow Al2O3 there are still many atomic level details of the SIS process that require more investigation, including the origin of the differences in infiltration of TMA into different polymers. In this paper, we investigated in detail the Infiltration of Al2O3 into poly (methyl methacrylate) (PMMA) and poly (lactic acid) (PLA) experimentally and theoretically. SIS was performed in a standard ALD reactor, operating at 70°C in quasi-static mode, using TMA and water as the metal and oxygen precursors, respectively. Operando spectroscopic ellipsometry and ex-situ x-ray photoelectron spectroscopy (XPS) evidenced that Al2O3 incorporation in PLA is significantly higher than in PMMA even if, in both cases, TMA incorporation occurs through the formation of an Al-O covalent bond at the C-O-C group. The extent of swelling of the polymers upon TMA infiltration is assessed and is clearly larger for TMA in PLA than in PMMA. First principles density functional theory (DFT) calculations highlighted that both polymers display swelling upon TMA infiltration, saturating with increasing TMA, consistent with operando ellipsometry observations. The DFT results also show the origin of the larger swelling in PLA compared to TMA. Changes in vibrational modes of carbonyl backbone groups in the polymers are used to demonstrate TMA-polymer interactions from both experiment and simulation. The differences in TMA infiltration and swelling arises from differences in the TMA-polymer C-O-C group interaction, which is more exothermic in PLA than in PMMA, in agreement with experimental results. The combination of experimental and theoretical studies herein reported provides a toolkit to disclose the complexities of SIS at the molecular level.

Effect of the Density of Reactive Sites in P(S-r-MMA) Film During Al2O3 Growth by Sequential Infiltration Synthesis

Trimethylaluminum Diffusion in PMMA Thin Films during Sequential Infiltration Synthesis: In Situ Dynamic Spectroscopic Ellipsometric Investigation

On the differences in trimethylaluminum infiltration into PMMA and PLA polymers for sequential infiltration synthesis: insights from experiment and first principles simulations

Ozone-based sequential infiltration synthesis of Al2O3 nanostructures in symmetric block copolymer

Electrostatic Absorption of Initiator Onto Nanometer SiO2 Particles and In-Situ Emulsion Polymerization of Methyl Methacrylate in the Presence of Modified Nanometer SiO2

Effect of Nanostructured Domains in Self-Assembled Block Copolymer Films on Sequential Infiltration Synthesis

Dispersion Atom Transfer Radical Polymerization of Vinyl Monomers in Supercritical Carbon Dioxide

Preparation of Poly (methyl Methacrylate)/nanometer Calcium Carbonate Composite by In-Situ Emulsion Polymerization

In-Situ Heterogenous Polymerization of Methyl Methacrylateonto Nanometer Calcium Carbonate Particles

Microscopic Spacial Effect on the Dispersion Polymerization in Scco2

Insight into the effects of reaction conditions on metal-free surface-initiated atom-transfer radical polymerization of methyl methacrylate from SBA-15

Effect Of Ligand Spacer On Silica Gel Supported Atom Transfer Radical Polymerization Of Methyl Methacrylate

Diffusion Behavior and Kinetics for the Vapor Phase Infiltration of Trimethylaluminum in Poly(ethylene oxide): An In Situ Quartz Crystal Microgravimetry Study

Mechanical Behavior of Hybrid Thin Films Fabricated by Sequential Infiltration Synthesis in Water-Rich Environment

Synthesis of Ultrahigh Molecular Weight Poly(methyl Methacrylate) via the Polymerization of MMA Initiated by the Combination of Palladium Carboxylates with Thiols

Facile Synthesis of Poly(methyl methacrylate) Silica Nanocomposite Monolith by In Situ Free Radical Polymerization of Methyl Methacrylate in the Presence of Functionalized Silica Nanoparticles

Fabrication of Poly(methyl Methacrylate)‐block‐poly(n‐isopropylacrylamide) Amphiphilic Diblock Copolymer on Silicon Substrates Via Surface‐initiated Reverse Iodine Transfer Polymerization

Volume compensating materials after vapor phase infiltration: effect of different butyl isomers of polymer side-chains on high process temperature durability

Effects of Mesoporous Silica Particles on the Emulsion Polymerization of Methyl Methacrylate

Synthesis of Ultra-High Molecular Weight Poly(methyl Methacrylate) with Hydrosilane As Initiator

Effect of Dispersed Polymeric Nanoparticles on the Bulk Polymerization of Methyl Methacrylate