Abstract:Sequential infiltration synthesis (SIS) is a powerful approach for templated growth of solid materials such as oxides or metals that exploits the difference in interaction of a precursor molecule with a polymer or block copolymer. While there have been studies showing that infiltration of trimethyl-alumina (TMA) in polymers can be used to grow Al2O3 there are still many atomic level details of the SIS process that require more investigation, including the origin of the differences in infiltration of TMA into different polymers. In this paper, we investigated in detail the Infiltration of Al2O3 into poly (methyl methacrylate) (PMMA) and poly (lactic acid) (PLA) experimentally and theoretically. SIS was performed in a standard ALD reactor, operating at 70°C in quasi-static mode, using TMA and water as the metal and oxygen precursors, respectively. Operando spectroscopic ellipsometry and ex-situ x-ray photoelectron spectroscopy (XPS) evidenced that Al2O3 incorporation in PLA is significantly higher than in PMMA even if, in both cases, TMA incorporation occurs through the formation of an Al-O covalent bond at the C-O-C group. The extent of swelling of the polymers upon TMA infiltration is assessed and is clearly larger for TMA in PLA than in PMMA. First principles density functional theory (DFT) calculations highlighted that both polymers display swelling upon TMA infiltration, saturating with increasing TMA, consistent with operando ellipsometry observations. The DFT results also show the origin of the larger swelling in PLA compared to TMA. Changes in vibrational modes of carbonyl backbone groups in the polymers are used to demonstrate TMA-polymer interactions from both experiment and simulation. The differences in TMA infiltration and swelling arises from differences in the TMA-polymer C-O-C group interaction, which is more exothermic in PLA than in PMMA, in agreement with experimental results. The combination of experimental and theoretical studies herein reported provides a toolkit to disclose the complexities of SIS at the molecular level.

Mechanical Behavior of Hybrid Thin Films Fabricated by Sequential Infiltration Synthesis in Water-Rich Environment

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Vapor-Phase Molecular Doping in Covalent Organosiloxane Network Thin Films Via a Lewis Acid-Base Interaction for Enhanced Mechanical Properties

Fabrication and Properties of Thermosensitive Organic/inorganic Hybrid Hydrogel Thin Films.

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Porous Polymer Structures with Tunable Mechanical Properties Using a Water Emulsion Ink

Trimethylaluminum Diffusion in PMMA Thin Films during Sequential Infiltration Synthesis: In Situ Dynamic Spectroscopic Ellipsometric Investigation

Effect of Nanostructured Domains in Self-Assembled Block Copolymer Films on Sequential Infiltration Synthesis

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The Development and Atomic Structure of Zinc Oxide Crystals Grown within Polymers from Vapor Phase Precursors

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Structure and Mechanical Properties of the Hybrid Films of Well Dispersed SiO2 Nanoparticle in Polyimide (pi/sio2) Prepared by Sol–gel Process

SMART Transfer Method to Directly Compare the Mechanical Response of Water-Supported and Free-Standing Ultrathin Polymeric Films.

Depth profiles of aluminum component in sequential infiltration synthesis-treated electron beam resist films analyzed by time-of-flight secondary ion mass spectrometry

Water‐assisted Mechanical Testing of Polymeric Thin‐films

Mechanical Reinforcement and UV Ageing Resistance of SiO2/C Hybrid on Poly(butylene Adipate‑co‑terephthalate) Film

Nano-Confinement Effects on Structural Development and Organic Solvent-Induced Swelling of Ultrathin Carbon Molecular Sieve Films

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Organic-Inorganic Hybrid Materials Based on Mesoporous Silica Derivatives for Humidity Sensing

Precise Pore Size Tailoring and Surface Chemistry Modification of Polycarbonate Membranes Using Atomic Layer Deposition