Chemisorption of tetrakis(dimethylamino)zirconium on zirconium oxide: Density functional theory study

Romel Hidayat,Hye-Lee Kim,Yong R. Sriwijaya,Khabib Khumaini,Won-Jun Lee
DOI: https://doi.org/10.1016/j.surfin.2024.104480
IF: 6.2
2024-05-23
Surfaces and Interfaces
Abstract:We investigated the chemisorption mechanism of tetrakis(dimethylamino)zirconium, Zr(NMe 2 ) 4 , on zirconium oxide (ZrO 2 ) to understand the first half-reaction of the atomic layer deposition (ALD) process of ZrO 2 films. A hydroxylated monoclinic ZrO 2 (-111) 2×2 slab model was constructed, and the surface hydroxyl group density was optimized. The obtained density through the optimization procedure was 4.5 nm −2 , which closely matches the value reported in the literature. Then, the sequential ligand exchange reactions involving a Zr(NMe 2 ) 4 molecule and the –OH terminated ZrO 2 surface were simulated. The first two reactions had low activation energies of 0.19 and 0.24 eV and were exothermic. Conversely, the third reaction was endothermic. Therefore, the resulting surface species after chemisorption was expected to be O 2 Zr(NMe 2 ) 2 *, which is consistent with in situ analyses in the literature.
chemistry, physical,physics, applied, condensed matter,materials science, coatings & films
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