Abstract:Recent years have witnessed the rapid development of flat optical elements (i.e., metasurfaces). With properly designed and arranged sub-wavelength structures over its plane, a metasurface is able to impart arbitrary, spatially variant amplitude, phase and polarization modulations on an incident electromagnetic wave. This highly customizable nature allows metasurface to simultaneously accomplish a variety of functions that have traditionally been fulfilled by a combination of different optics, such as gratings, lenses, beam splitters, and hologram plates, with a significantly reduced physical thickness compared to traditional optical elements. Researchers have demonstrated various high-performance metasurfaces operating in the infrared (IR) and visible regime. However, there has been a conspicuous lack of work in the ultraviolet (UV) region, which is a spectral range hosting important applications such as photolithography, DNA sequencing, sterilization, and medical imaging. Unfortunately, direct translation to the UV regime of implementation strategies for IR and visible-frequency metasurfaces will not work, so new constituent materials and designs need to be developed. Here, we report on high-efficiency, all-dielectric metasurfaces operating in the UV regime. The metasurfaces utilize wide bandgap (> 5.5 eV) dielectric materials, enabling the devices to operate over a broad-band UV range. We demonstrate metasurfaces working at three UV wavelengths (364, 325 and 266 nm), including hologram, lens, and self-accelerating beam devices. To further show the versatility of our design, we demonstrate metasurfaces producing spin-multiplexed holograms and self-accelerating beams at 364 nm, with operational efficiencies larger than 50%. Our work opens the door for high-performance and multi-functional UV flat optical elements.

One-step printable platform for high-efficiency metasurfaces down to the deep-ultraviolet region

Omnidirectional, Thin Metasurface Exhibiting Selective Absorption for Un-Polarized Broadband Incidence

Simple route for high-throughput fabrication of metasurfaces using one-step UV-curable resin printing

Tailoring high-refractive-index nanocomposites for manufacturing of ultraviolet metasurfaces

Multifunctional Metasurface: Coplanar Embedded Design for Metalens and Nanoprinted Display

High-Efficiency, All-Dielectric Metasurfaces Down to the Deep Ultraviolet

High‐Throughput Fabrication of Large‐Scale Metaholograms via One‐step Printing

High-performance all-dielectric ultraviolet metasurfaces (Conference Presentation)

Low-loss Metasurface Optics Down to the Deep Ultraviolet Region.

All‐Silicon Broadband Ultraviolet Metasurfaces

8′′ wafer-scale, centimeter-sized, high-efficiency metalenses in the ultraviolet

Scalable manufacturing of high-index atomic layer–polymer hybrid metasurfaces for metaphotonics in the visible

Printable Light-Emitting Metasurfaces with Enhanced Directional Photoluminescence

Scalably manufactured high-index atomic layer-polymer hybrid metasurfaces for high-efficiency virtual reality metaoptics in the visible

UV-Nanoimprint and Deep Reactive Ion Etching of High Efficiency Silicon Metalenses: High Throughput at Low Cost with Excellent Resolution and Repeatability

Ultraviolet metasurface based on highly scattering silicon antennas (Conference Presentation)

Ultraviolet-Visible Multifunctional Vortex Metaplates by Breaking Conventional Rotational Symmetry

Nanoimprint lithography for high-throughput fabrication of metasurfaces

High efficiency glass-based VUV metasurfaces

High-throughput Fabrication of Large-Scale Metasurfaces Using Electron-Beam Lithography with SU-8 Gratings for Multilevel Security Printing

Highly Efficient Perfect Vortex Beams Generation Based on All-Dielectric Metasurface for Ultraviolet Light