Preparation of ZnO Piezoelectric Thin-Film Material for Ultrasonic Transducers Applied in Bolt Stress Measurement

Yuxia Zhang,Yanghui Jiang,Chi Ma,Jun Zhang,Bing Yang

DOI: https://doi.org/10.3390/coatings13091538

IF: 3.236

2023-09-02

Coatings

Abstract:The measurement of bolt preload by using ultrasound can be accurate, convenient, and can realize the real-time monitoring of the change in the residual axial stress of a bolt during use. In order to realize the ultrasonic measurement of bolt preload, the use of zinc oxide (ZnO) piezoelectric thin-film material as an ultrasonic transducer material to stimulate an ultrasonic signal on the bolt is a feasible solution. In this paper, we choose to use RF magnetron sputtering technology to prepare ZnO piezoelectric thin-film materials and study the effects of sputtering power and target substrate distance on the structure and ultrasonic properties of ZnO piezoelectric thin films during the preparation process, in order to lay the foundation for realizing the application of ZnO piezoelectric thin films in the field of bolt preload measurement. The experimental results show that too-large sputtering power or too-small target substrate distance will result in the particles having too much kinetic energy during sputtering and exhibiting a structure of multiorientation growth, which excites ultrasonic longitudinal–transverse waves. A sputtering power of 600 W, sputtering time of 4 h, and target substrate distance of 100 mm are ideal experimental parameters for a ZnO piezoelectric thin-film material to be excited by an ultrasonic longitudinal wave signal, and its ideal operating frequency is 41 MHZ. These research results of bolt stress detection demonstrate good application prospects.

materials science, multidisciplinary,physics, applied, coatings & films

What problem does this paper attempt to address?

### The Problem the Paper Attempts to Solve

The paper aims to address the issues of accuracy and practicality in bolt preload measurement. Traditional bolt preload measurement methods (such as torque method, nut rotation method, yield point method, and resistance strain gauge method) have certain accuracy and practicality defects due to factors like friction on the contact surface and the elastic-plastic deformation of the bolt. Therefore, there is an urgent need for a convenient and accurate bolt preload measurement technology.

The paper proposes a method of using piezoelectric material (zinc oxide, ZnO) to prepare an ultrasonic transducer film. By depositing a ZnO film on the bolt surface and exciting ultrasonic signals, non-contact measurement of bolt preload can be achieved. This method allows real-time monitoring of bolt preload without disassembling the bolt, thereby improving the safety and reliability of engineering structures.

Specifically, the paper studies the effects of sputtering power and target-substrate distance on the film structure and ultrasonic performance during the preparation of ZnO piezoelectric films using radio frequency magnetron sputtering technology. The goal is to determine the optimal experimental parameters and lay the foundation for the application of ZnO piezoelectric films in the field of bolt preload measurement.