Diamond Schottky barrier diode fabricated on high-crystalline quality misoriented heteroepitaxial (001) diamond substrate

Taemyung Kwak,Sanghun Han,Uiho Choi,Seong-Woo Kim,Okhyun Nam
DOI: https://doi.org/10.1016/j.diamond.2023.109750
IF: 3.806
2023-02-13
Diamond and Related Materials
Abstract:We evaluated the performance of a diamond Schottky barrier diode (SBD) fabricated on a high-quality 7° off-axis heteroepitaxial (001) diamond substrate. The self-separated free-standing heteroepitaxial diamond substrate was grown on misoriented sapphire (α-Al 2 O 3 ) with step-flow growth mode. It is Pseudo-vertical SBD with p + highly boron-doped epitaxial layer and 600 nm thin i-layer. The diamond SBDs showed high crystalline quality and excellent device performance. They exhibited a breakdown field strength of 2.1 MV·cm −1 , which is the highest value ever reported for heteroepitaxial diamond SBDs. These results confirm the feasibility of realizing 2-inched wafer-scale diamonds in the field of power electronics.
materials science, multidisciplinary,physics, applied, condensed matter, coatings & films
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