One step reactive ion etching of black germanium conical nanostructures: Ultra-wide solar spectral absorption, finite element simulation, super hydrophilicity, photothermal conversion
Yongheng Chen,Cai Zhang,Zao Yi,Jingjun Wu,Yubin Zhang,Liang Bian,Li liu,Xin Ye,Hua Yang,Hailiang Li
DOI: https://doi.org/10.1016/j.solmat.2022.112005
IF: 6.9
2022-12-01
Solar Energy Materials and Solar Cells
Abstract:We report a reactive ion etching process based on SF6–CHF3, which can prepare black germanium at low RF power and normal temperature. The absorption of black germanium in the spectral range of 300–1750 nm is greater than 99%. Spectral selectivity optimization allows nano tapered germanium to absorb nearly 98.1% of solar radiation. This nanostructure is uniform in a large area and also supports patterning design for the application in related fields such as photothermal imaging. Here, we discuss the effect of SF6 and CHF3 plasma concentrations on the progress of chemical reactions on the germanium surface and their essential role in forming tapered nanostructures. We observe its surface plasmon resonance by finite-difference time-domain way. Finally evaluate its feasibility in devices by photothermal conversion and water droplet evaporation experiments. The proposal of this work provides an available method for semiconductor micromachining, and also provides experimental and theoretical support for the efficient thermal utilization of solar energy.
materials science, multidisciplinary,physics, applied,energy & fuels