Chalcogenide Coatings of Ge_15Sb_20S_65 and Te_20As_30Se_50
Virginie Nazabal,Michel Cathelinaud,Weidong Shen,Petr Nemec,Frederic Charpentier,Herve Lhermite,Marie-Laure Anne,Jeremie Capoulade,Fabien Grasset,Alain Moreac,Satoru Inoue,Miloslav Frumar,Jean-Luc Adam,Michel Lequime,Claude Amra
DOI: https://doi.org/10.1364/ao.47.00c114
IF: 1.9
2007-01-01
Applied Optics
Abstract:Chalcogenide coatings are investigated to obtain either optical components for spectral applications or optochemical sensors in the mid-infrared. The deposition of Ge15Sb20S65 and Te20As30Se50 chalcogenide glasses is performed by two physical techniques: electron-beam and pulsed-laser deposition. The quality of the film is analyzed by scanning electron microscopy, atomic force microscopy, and energy dispersive spectroscopy to characterize the morphology, topography, and chemical composition. The optical properties and optical constants are also determined. A CF4 dry etching is performed on these films to obtain a channeled optical waveguide. For a passband filter made by electron-beam deposition, cryolite as a low-refractive-index material and chalcogenide glasses as high-refractive-index materials are used to favor a large refractive-index contrast. A shift of a centered wavelength of a photosensitive passband filter is controlled by illumination time. (C) 2008 Optical Society of America.