Study of the influence of diamond-like carbon film deposition technology on the change of its physical and mechanical characteristics

Artem Runts,Sergei Ruchin,Yurii Zhidik,Alena Yurjeva,Mariya Polosukhina
DOI: https://doi.org/10.51368/1996-0948-2021-6-58-62
2021-12-27
Applied Physics
Abstract:The paper presents the results of testing the technology of deposition of diamond-like carbon films on the surface of stainless steel substrates at different process parameters, a quantitative assessment of the sp3 bond content and the physical and mechanical characteristics of the coatings obtained, a conclusion about the influence of the deposition process technological parameters on these characteristics is formulated.
What problem does this paper attempt to address?