Influence of Heat-Treatment on Mechanical and Frictional Properties of DLC Films with and Without Ti Underlayer

KAZACHENKO V P,POPOV A N,ROGACHEV A V
DOI: https://doi.org/10.3321/j.issn:1004-0595.2004.03.005
2004-01-01
Tribology
Abstract:Diamond-like carbon (DLC) films with and without Ti underlayer were prepared with complex plasma arc of DC magnetic separation and pulsed cathode. The mechanical properties, structures, and surface morphologies of the films were analyzed by means of nano-indentation, atomic force microscopy, and X-ray photoelectron spectroscopy. The friction behaviors of the films sliding against SAE-52100 steel under ambient dry conditions were investigated on a УСК-1 friction and wear tester in ball-on-disc configuration. It was found that the DLC films with Ti underlayer had lower hardness and elastic modulus than those without Ti underlayer. The annealing of the DLC film without the underlayer in vacuum up to 500 ℃ led to little change in the mechanical properties and morphologies. However, the DLC film without the Ti underlayer annealed at 500 ℃ in air showed a greatly decreased friction coefficient, which was attributed to the easier graphitization of the film in air. Moreover, TiO_2 and TiC were detected in the DLC film with the Ti underlayer annealed at 400 ℃ in vacuum, which was attributed to the competitive oxidation and carburization of Ti.
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