Abstract:Glass is a widely used material in key fields such as Micro-Electro-Mechanical Systems (MEMS) due to its excellent properties. The existing non-traditional glass machining methods have problems such as high pollution, difficult operation, and poor sustainability, this article utilizes the effective combination of electrochemical discharge machining and grinding (named electrochemical discharge grinding, ECDG), by using NaHCO 3 solution as electrolyte to achieve green machining. Utilizing ultrasonic vibration and multi-hole tube electrode to achieve precise and stable machining. Modeling and simulation analysis were conducted on the material removal rate and grinding force during the machining process, which profoundly revealed the joint improvement mechanism of spark discharge and ultrasonic vibration on grinding quality. First, a single factor experiment was used to preliminarily determine the machining threshold. Second, the Plackett-Burman experiment was used to screen key machining parameters. Then, Box-Behnken experiment was conducted on key machining parameters, and multi-objective and multi-factor optimization was performed to obtain the optimal combination of machining parameters. Compared with normal ECDG with cylindrical grinding electrode, the overcut is reduced by 8.3 %, the edge damage is reduced by 17.5 % and the surface roughness value is reduced by 70.6 %. Finally, by using the optimized combination of machining parameters, high-quality and stable machining of typical microchannel structures was achieved. The milling depth of the microchannel is 400 μm. The machining width is 1175 ± 5 μm. The surface roughness of the measurement area is 0.375 μm. The green, high-quality and stable machining of micro glass micro components further demonstrates the potential application of this compound technology.

Electrochemical oxidation assisted micromachining of glassy carbon substrate

Microfabrication of Glassy Carbon by Electrochemical Etching

Ultrasonic vibration-assisted microgrinding of glassy carbon

A green and precision compound machining method for glass micro components – Ultrasonic assisted electrochemical discharge grinding with multi-hole tube electrode

Micro Array Hole Formation in Glass Using Electrochemical Discharge Machining

Computational modelling and experimental investigation of micro-electrochemical discharge machining by controlling the electrolyte temperature

CMOS-Compatible Electrochemical Nanoimprint:High Throughput Fabrication of Ordered Microstructures on Semiconductor Wafer by Using a Glassy Carbon Mold

Study on the stability of gas film in electrochemical discharge machining of ultra-white glass micro array holes

A Hybrid Process of Electrochemical Discharge Machining (ECDM) and High-Speed Milling (HSM) on Quartz Glass

Electrochemical discharge machining of microchannels in glass using a non-Newtonian fluid electrolyte

Investigation of Surface Integrity Induced by Ultra-Precision Grinding and Scratching of Glassy Carbon

Anodic Dissolution Behavior of a Zr-based Bulk Metallic Glass and the Electrochemical Machining of Small Structures with High Geometrical Precision and Good Surface Quality

The dissolution characteristics and wire electrochemical micromachining of metallic glass Ni82Cr7Si5Fe3B3

A study on wire electrochemical micromachining for fabrication of microgrooves

Chemical Etching Processes at the Dynamic GaAs/Electrolyte Interface in the Electrochemical Direct-Writing Micromachining

Micro-structuring of glassy carbon for precision glass molding of binary diffractive optical elements

An Investigation into Laser-Assisted Electrochemical Discharge Machining of Transparent Insulating Hard-Brittle Material

Exploring nitrogen gas-assisted ECDμM of glass by modified blackwidow optimization

Fabrication of antireflection structures on glassy carbon surfaces using electron beam lithography and oxygen dry etching

Improvement in performance during micromachining of borosilicate glass with temperature-stirring-assisted ECDM

A Profile Shaping and Surface Finishing Process of Micro Electrochemical Machining for Microstructures on Microfluidic Chip Molds