Abstract:The time-dependent irreversible deformation of thin metal films on substrates is investigated on various levels of modeling. The work focuses on polycrystalline films without cap layer, where diffusive processes play an important role. A continuum level model of constrained grain boundary diffusion describes how surface and grain boundary diffusion lead to the relaxation of tractions along the grain boundaries. If the film is perfectly bonded to the substrate, the relaxation of tractions along the grain boundary leads to a crack-like stress concentration close to the film/substrate interface. By virtue of this stress concentration, dislocations on glide planes parallel to the thin film are subject to a driving force that does not exist in the case of purely bi-axial loading. This model gives a theoretical basis for experimental observations of such parallel glide processes. To obtain a better understanding of the microscopic phenomena associated with the this creep process, we conducted large scale molecular dynamics (MD) simulations, as well as discrete dislocation dynamics (DDD) studies on intermediate length scales. The results of these numerical simulations reveal that nucleation of glissile dislocations at the tip of the diffusion wedge can be described with a critical stress intensity factor criterion. The validation of this criterion for dislocation nucleation by MD simulations allows transferring this information onto the DDD length and time scales. The deformation behavior of thin films is investigated with DDD simulations on length scales from nanometers to microns. If only dislocation glide is active, DDD simulations with a constant density of dislocation sources show that the flow stress of thin films scales linearly with the inverse film thickness. Furthermore, the DDD simulations reveal that, upon activation of the creep mechanisms in ultra-thin films the size scaling of the flow stress breaks down. Instead, such films show a thickness-independent flow stress. These findings agree well with experimental observations.

Kinetics and magnitude of the reversible stress evolution during polycrystalline film growth interruptions

An Analysis of Photopolymerization Kinetics and Stress Development in Multifunctional Acrylate Coatings

Kinetics of Intrinsic Stress in Nanocrystalline Films

Physically-based Interpretation of Abnormal Stress Relaxation Response in Glassy Polymers

FORMATION OF CRACK-LIKE DIFFUSION WEDGES AND COMPRESSIVE STRESS EVOLUTION DURING THIN FILM GROWTH WITH INHOMOGENEOUS GRAIN BOUNDARY DIFFUSIVITY

Growth kinetics and origin of residual stress of two-phase crystalline–amorphous nanostructured films

Inhomogeneous Deformation of Microcrystalline Region in Isotactic Polypropylene Film Revealed by A Simultaneous Kinetic Measurement of Microscopic Infrared Dichroism and Macroscopic Stress

Dynamic evolution of internal stress, grain growth, and crystallographic texture in arc-evaporated AlTiN thin films using in-situ synchrotron x-ray diffraction

Emergent grain boundary phases in stressed polycrystalline thin films

Confined Capillary Stresses During the Initial Growth of Thin Films on Amorphous Substrates

5542 - MULTI-SCALE MODELING OF DEFORMATION IN POLYCRYSTALLINE THIN METAL FILMS

Some general properties of stress-driven surface evolution in a heteroepitaxial thin film structure

How metal films de-wet substrates - identifying the kinetic pathways and energetic driving forces

Effect of Growth Interruptions on TiO2 Films Deposited by Plasma Enhanced Chemical Vapour Deposition

A Numerical Study of Stress Controlled Surface Diffusion During Epitaxial Film Growth

Multiscale Modeling of Deformation in Polycrystalline Thin Metal Films on Substrates

Hierarchical Multi-Scale Modelling of Plasticity of Submicron Thin Metal Films

Analytical model of transient compressive stress evolution during growth of high diffusivity thin films on substrates

Growth stress induced tunability of dielectric permittivity in thin films

A Discrete Dislocation Plasticity Model of Creep in Polycrystalline Thin Films