Abstract:Block copolymer lithography, an alternative lithographic technique by which self-assembled patterns made from block copolymer thin films are used as lithographic masks, has achieved a high enough level of maturity to be considered for nanofabrication in magnetic recording bit patterned media and in some applications in the semiconductor industry. As the demand for lithographic dimensions squeezes into the single-digit nm scale, pairing block copolymer materials that segregate at these dimensions with adequate pattern transfer techniques is increasingly difficult. For example, PS-b-PMMA, the most mature block copolymer system can only form line/space patterns with pattern transfer above 10 nm. Other promising materials like P2VP-PS-P2VP triblocks, however, lack sufficient etch contrast for reactive ion etching. Here, we present a nanofabrication strategy that integrates atomic layer deposition, ALD, with block copolymer lithography to enable fabrication of sub-10nm features for high density magnetic storage. The selective, cyclic and self-terminating nature of the materials synthesis within ALD reactors provides powerful nanofabrication tools. In particular, two of these tools stand out as enablers for high density patterning: First, the chemical selectivity of the organometallic precursors has facilitated selective synthesis inside porous polymeric materials. Second, the conformality afforded by the self-terminating nature of the ALD reactions has proven to be ideally suited for feature doubling in self-aligned double patterning, SADP. Integrating these powerful tools with block copolymer lithography opens new possibilities in two fronts: On the one hand, it is possible to generate hybrid nanocomposites with nanometer-scale resolution and high etching contrast. This is particularly useful for high resolution block copolymer materials for which no natural etch contrast exists such as P2VP-PS-P2VP triblocks. On the other hand, it is possible to use the already sub-lithographic features obtained by standard PS-b-PMMA block copolymer lithography as the starting point for an additional density multiplication using spacer lines grown by ALD for SADP. Be it for selective infiltration synthesis in block copolymer patterns or for the precise conformal growth in nanostructures made from block copolymers, ALD is likely to emerge as an ideal complimentary technique to block copolymer self assembly to enable sub-10nm lithography.

Universal pattern transfer methods for metal nanostructures by block copolymer lithography

Highly Tunable Complementary Micro/Submicro-Nanopatterned Surfaces Combining Block Copolymer Self-Assembly and Colloidal Lithography.

High molecular weight block copolymer lithography for nanofabrication of hard mask and photonic nanostructures

Simultaneous fabrication of line and dot dual nanopatterns using miktoarm block copolymer with photocleavable linker

Transfer of pre-assembled block copolymer thin film to nanopattern unconventional substrates

Constructing a Comprehensive Nanopattern Library through Morphological Transitions of Block Copolymer Surface Micelles via Direct Solvent Immersion

Direct Printing of Ultrathin Block Copolymer Film with Nano‐in‐Micro Pattern Structures

Sequential Nanopatterned Block Copolymer Self-Assembly on Surfaces.

Tailoring Nanostructures Using Copolymer Nanoimprint Lithography

A Facile Method of Forming Nanoscale Patterns on Poly(ethylene Glycol)-Based Surfaces by Self-Assembly of Randomly Grafted Block Copolymer Brushes.

Nanostructured submicron block copolymer dots by sacrificial stamping: a potential preconcentration platform for locally resolved sensing, chemistry and cellular interactions

Development of a facile block copolymer method for creating hard mask patterns integrated into semiconductor manufacturing

Directed self-assembly of high-chi block copolymer for nano fabrication of bit patterned media via solvent annealing

Unconventional Lithography for Patterned Nanomaterials

Enabling Sub-10nm Lithography with Atomic Layer Deposition and Block Copolymer Self Assembly

Synthesis of CoFe2O4 Nanodot Arrays via Diblock Copolymer Template Method

Tailoring Two-Dimensional Nanoparticle Arrays into Various Patterns

Nanoparticle assembly by transient topography induced by applying soft lithography to block copolymer films

Fabrication of Ultrafine L10-FePt-Based Magnetic Patterns Enabled by Single-Step Nanoimprint-Assisted Block Copolymer Self-Assembly.

Fabrication Of Micro-Nano Hybrid Patterns On A Solid Surface

Growing Embossed Nanostructures of Polymer Brushes on Wet-Etched Silicon Templated Via Block Copolymers