Abstract:Two-dimensional (2D) semiconductors have been a central focus for next-generation electronics and optoelectronics owing to their great potential to extend the scaling limits in a silicon transistor. However, due to the lack of surface dangling bonds in most 2D semiconductors, such as graphene and transition metal dichalcogenides (TMDs), the direct growth of the high-κ film on these 2D materials via an atomic layer deposition (ALD) technique often produces dielectrics with poor quality, which hinders their integration in the modern semiconductor industry. Here, we comprehensively investigate the ALD growth of the Al2O3 layer on 2D exfoliated black phosphorus (BP). Intriguingly, we found that the 2D BP with "silicon-like" characteristics possesses a native surface oxide layer PxOy after air exposure. The PxOy-induced surface dangling bonds enable the spontaneous integration of the high-quality Al2O3 layer on the BP flake without any pretreatments to functionalize the surface. Additionally, the Al2O3 layer could effectively passivate BP to prevent its degradation in ambient conditions, which addresses the most serious problem of the BP material. Moreover, the Al2O3-encapsulated BP field-effect transistor (FET) exhibits good electrical transport performance, with a high hole mobility of ∼420 cm2 V-1 s-1 and electron mobility of ∼80 cm2 V-1 s-1. Moreover, the high-quality Al2O3 layer can also be integrated into the top-gated BP transistor and inverter. Our findings reveal the silicon-like characteristics of BP for the high-κ ALD dielectric growth technology, which promises the seamless integration of 2D BP in the modern semiconductor industry.

Two-step heating synthesis of sub-3 millimeter-sized orthorhombic black phosphorus single crystal by chemical vapor transport reaction method

Growth of 2D Black Phosphorus Film from Chemical Vapor Deposition.

High yield growth of centimeter-sized black phosphorus single crystal thin flakes through bidirectional vapor transport

Synthesis of Crystalline Black Phosphorus Thin Film on Sapphire

Synthesis of High-Quality Bulk Single-Crystal Black Phosphorus by the Circulating Vapor Growth Approach

Growth of single-crystal black phosphorus and its alloy films through sustained feedstock release

Epitaxial Nucleation And Lateral Growth Of High-Crystalline Black Phosphorus Films On Silicon

Synthesis of thin-film black phosphorus on a flexible substrate

Thermal Sublimation: a Scalable and Controllable Thinning Method for the Fabrication of Few-Layer Black Phosphorus

A clean transfer approach to prepare centimetre-scale black phosphorus crystalline multilayers on silicon substrates for field-effect transistors

Fabrication of Doped Black Phosphorus Crystal by the Chemical Vapor Transport Method

Hittorf'S Phosphorus: the Missing Link During Transformation of Red Phosphorus to Black Phosphorus

The preparation of black phosphorus in RP/Sn/I2 system: its nucleation agent and relatively optimal temperature program

Facile Sonochemical-Assisted Synthesis of Orthorhombic Phase Black Phosphorus/rgo Hybrids for Effective Photothermal Therapy

Wet Chemical Method for Black Phosphorus Thinning and Passivation.

Progress in the synthesis of 2D black phosphorus beyond exfoliation

Facile synthesis of black phosphorus directly grown on carbon paper as an efficient OER Electrocatalyst: Role of Interfacial charge transfer and induced local charge distribution

Synthesis and stabilization of black phosphorus and phosphorene: recent progress and perspectives

Ultrafast Electrochemical Expansion of Black Phosphorus Toward High-Yield Synthesis of Few-Layer Phosphorene

Native Oxide Seeded Spontaneous Integration of Dielectrics on Exfoliated Black Phosphorus

Low-Temperature Solution Synthesis of Black Phosphorus from Red Phosphorus: Crystallization Mechanism and Lithium Ion Battery Applications