Tilting micromirror platform based on liquid dielectrophoresis

Iman Frozanpoor,Michael Cooke,Diana Alvarez-Ruiz,Vibin Ambukan,Andrew Gallant,Claudio Balocco
DOI: https://doi.org/10.1016/j.sna.2021.113177
2021-12-01
Abstract:This study presents an electrically actuated tilting micro platform based on liquid dielectrophoresis with three axes movement using three droplets situated 120° apart from each other. The interdigitated electrodes produce a non-uniform electric field that generates a body force. The dielectrophoretic mechanism is responsive within at least 30 ms, and it eliminates the solid-solid contact. The tilting platform enabled an angular coverage up to 0.9° (±0.02°), with a maximum displacement of 120 µm. The tilting micromirror platform has beam steering characteristics suitable for various optical applications. The actuating platform sensor is a cost-effective and simple alternative method to study liquid dielectrophoresis without measuring the droplet contact angle. Furthermore, the unique configuration without any solid-solid contact offers a potential improvement for applications in optics, actuators, and other conventional microelectromechanical systems.
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