Abstract:Hexagonal boron nitride (h-BN) is a promising two-dimensional insulator with a large band gap and low density of charged impurities that is isostructural and isoelectronic with graphene. Here we report the chemical and atomic-scale structure of CVD-grown wafer-scale (∼25 cm2) h-BN sheets ranging in thickness from 1 to 20 monolayers. Atomic-scale images of h-BN on Au and graphene/Au substrates obtained by scanning tunneling microscopy reveal high h-BN crystalline quality in monolayer samples. Further characterization of 1–20 monolayer samples indicates uniform thickness for wafer-scale areas; this thickness control is a result of precise control of the precursor flow rate, deposition temperature and pressure. Raman and infrared spectroscopy indicate the presence of B–N bonds and reveal a linear dependence of thickness with growth time. X-ray photoelectron spectroscopy shows the film stoichiometry, and the B/N atom ratio in our films is 1 ± 0.6% across the range of thicknesses. Electrical current transport in metal/insulator/metal (Au/h-BN/Au) heterostructures indicates that our CVD-grown h-BN films can act as excellent tunnel barriers with a high hard-breakdown field strength. Our results suggest that large-area h-BN films are structurally, chemically and electronically uniform over the wafer scale, opening the door to pervasive application as a dielectric in layered nanoelectronic and nanophotonic heterostructures.

Hexagonal boron nitride nanowalls: physical vapour deposition, 2D/3D morphology and spectroscopic analysis

Three-leaf Dart-Shaped Single-Crystal BN Formation Promoted by Surface Oxygen

Atomic-Precision Fabrication of Quasi-Full-Space Grain Boundaries in Two-Dimensional Hexagonal Boron Nitride.

Large scale growth and characterization of atomic hexagonal boron nitride layers.

Facile Synthesis and Characterization of Hexagonal Boron Nitride Nanoplates by Two‐Step Route

Raman Spectroscopy of Single-Wall Boron Nitride Nanotubes

Synthesis of Boron and Boride Compounds Nanowire Arrays by Chemical Vapor Deposition

From the synthesis of hBN crystals to their use as nanosheets in van der Waals heterostructures

Aligned single crystal boron nanowires

Orientation-controlled, low-temperature plasma growth and applications of h-BN nanosheets

From the synthesis of hBN crystals to their use as nanosheets for optoelectronic devices

Unveiling the atomic structure of single-wall boron nanotubes

Synthesis and Modification of Boron Nitride nanotubes using ion implantation

Bio-inspired Synthesis of Highly Crystallized Hexagonal Boron Nitride Nanosheets

Investigation on the Microstructure and Optical Properties of C-Axis Oriented Nanocrystalline Hexagonal Bn Films Fabricated by Hot-Filament Chemical Vapor Deposition

Hexagonal boron nitride: a review on selfstanding crystals synthesis towards 2D nanosheets

Characterization of boron nitride nanosheets synthesized by boron-ammonia reaction

Synthesis and characterization of carbon nanowalls on different substrates by radio frequency plasma enhanced chemical vapor deposition

Atomic-Scale Structural and Chemical Characterization of Hexagonal Boron Nitride Layers Synthesized at the Wafer-Scale with Monolayer Thickness Control

Application-Driven Synthesis and Characterization of Hexagonal Boron Nitride on Metal and Carbon Nanotube Substrates

Transition from amorphous boron carbide to hexagonal boron carbon nitride thin films induced by nitrogen ion assistance