Acoustic Wave Based MEMS Devices, Development and Applications

Ioana Voiculescu,Anis N.

DOI: https://doi.org/10.5772/28214

2012-03-28

Abstract:Acoustic Wave Based MEMS Devices, Development and Applications | InTechOpen, Published on: 2012-03-28. Authors: Ioana Voiculescu and Anis N. Nordin

What problem does this paper attempt to address?

Microwave Acoustic Wave Devices: Recent Advances on Architectures, Modeling, Materials, and Packaging

Amelie Hagelauer,Gernot Fattinger,Clemens Ruppel,Masanori Ueda,Ken-ya Hashimoto,A. Tag

DOI: https://doi.org/10.1109/TMTT.2018.2854160

IF: 4.3

2018-01-01

IEEE Transactions on Microwave Theory and Techniques

Abstract:This paper reviews applications of acoustic wave devices in mobile communication. After a general and historical introduction to bulk acoustic wave (BAW) and surface acoustic wave (SAW) devices, a review is given on the architectures where acoustic wave devices are applied driving the requirements on the SAW and BAW components. Following this, we discuss the progress in technology important materi...
Progress of MEMS acoustic emission sensor: a review

Junhui Zhang,Sai Zhang,Yuhua Yang,Wendong Zhang

DOI: https://doi.org/10.1108/sr-06-2023-0232

2024-06-01

Sensor Review

Abstract:Purpose Based on the micro-electro-mechanical system (MEMS) technology, acoustic emission sensors have gained popularity owing to their small size, consistency, affordability and easy integration. This study aims to provide direction for the advancement of MEMS acoustic emission sensors and predict their future potential for structural health detection of microprecision instruments. Design/methodology/approach This paper summarizes the recent research progress of three MEMS acoustic emission sensors, compares their individual strengths and weaknesses, analyzes their research focus and predicts their development trend in the future. Findings Piezoresistive, piezoelectric and capacitive MEMS acoustic emission sensors are the three main streams of MEMS acoustic emission sensors, which have their own advantages and disadvantages. The existing research has not been applied in practice, and MEMS acoustic emission sensor still needs further research in the aspects of wide frequency/high sensitivity, good robustness and integration with complementary metal oxide semiconductor. MEMS acoustic emission sensor has great development potential. Originality/value In this paper, the existing research achievements of MEMS acoustic emission sensors are described systematically, and the further development direction of MEMS acoustic emission sensors in the future research field is pointed out. It provides an important reference value for the actual weak acoustic emission signal detection in narrow structures.

instruments & instrumentation
Micro/nano Acoustofluidics: Materials, Phenomena, Design, Devices, and Applications.

William Connacher,Naiqing Zhang,An Huang,Jiyang Mei,Shuai Zhang,Tilvawala Gopesh,James Friend

DOI: https://doi.org/10.1039/c8lc00112j

IF: 7.517

2018-01-01

Lab on a Chip

Abstract:Acoustic actuation of fluids at small scales may finally enable a comprehensive lab-on-a-chip revolution in microfluidics, overcoming long-standing difficulties in fluid and particle manipulation on-chip. In this comprehensive review, we examine the fundamentals of piezoelectricity, piezoelectric materials, and transducers; revisit the basics of acoustofluidics; and give the reader a detailed look at recent technological advances and current scientific discussions in the discipline. Recent achievements are placed in the context of classic reports for the actuation of fluid and particles via acoustic waves, both within sessile drops and closed channels. Other aspects of micro/nano acoustofluidics are examined: atomization, translation, mixing, jetting, and particle manipulation in the context of sessile drops and fluid mixing and pumping, particle manipulation, and formation of droplets in the context of closed channels, plus the most recent results at the nanoscale. These achievements will enable applications across the disciplines of chemistry, biology, medicine, energy, manufacturing, and we suspect a number of others yet unimagined. Basic design concepts and illustrative applications are highlighted in each section, with an emphasis on lab-on-a-chip applications.
Acoustic Biosensors and Microfluidic Devices in the Decennium: Principles and Applications

Minu Prabhachandran Nair,Adrian J T Teo,King Ho Holden Li,Adrian J. T. Teo

DOI: https://doi.org/10.3390/mi13010024

IF: 3.4

2021-12-26

Micromachines

Abstract:Lab-on-a-chip (LOC) technology has gained primary attention in the past decade, where label-free biosensors and microfluidic actuation platforms are integrated to realize such LOC devices. Among the multitude of technologies that enables the successful integration of these two features, the piezoelectric acoustic wave method is best suited for handling biological samples due to biocompatibility, label-free and non-invasive properties. In this review paper, we present a study on the use of acoustic waves generated by piezoelectric materials in the area of label-free biosensors and microfluidic actuation towards the realization of LOC and POC devices. The categorization of acoustic wave technology into the bulk acoustic wave and surface acoustic wave has been considered with the inclusion of biological sample sensing and manipulation applications. This paper presents an approach with a comprehensive study on the fundamental operating principles of acoustic waves in biosensing and microfluidic actuation, acoustic wave modes suitable for sensing and actuation, piezoelectric materials used for acoustic wave generation, fabrication methods, and challenges in the use of acoustic wave modes in biosensing. Recent developments in the past decade, in various sensing potentialities of acoustic waves in a myriad of applications, including sensing of proteins, disease biomarkers, DNA, pathogenic microorganisms, acoustofluidic manipulation, and the sorting of biological samples such as cells, have been given primary focus. An insight into the future perspectives of real-time, label-free, and portable LOC devices utilizing acoustic waves is also presented. The developments in the field of thin-film piezoelectric materials, with the possibility of integrating sensing and actuation on a single platform utilizing the reversible property of smart piezoelectric materials, provide a step forward in the realization of monolithic integrated LOC and POC devices. Finally, the present paper highlights the key benefits and challenges in terms of commercialization, in the field of acoustic wave-based biosensors and actuation platforms.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Design Optimization of Surface Acoustic Wave Devices and Investigation of Fabricated Devices under Temperature, Humidity and Steam Environments

Suganya Anbalagan,L Sujatha,KG Girija

DOI: https://doi.org/10.1088/1402-4896/ad547b

2024-06-06

Physica Scripta

Abstract:Surface Acoustic Wave (SAW) technique is one of the most promising Micro Electro Mechanical Systems (MEMS) based detection methods for a variety of applications. SAW sensor is based on the modulation of Rayleigh waves that travel near the surface of a piezoelectric substrate. Advent of MEMS technology has led to the development of SAW sensors which are widely used in chemical sensing, medical, industrial, telecommunication and biological applications. The main focus of this paper is to devise and characterize a generic SAW structure and study the acoustic properties at various environmental conditions before depositing the sensing layer/analyte for any particular application. In this work, a SAW device was designed using COMSOL Multiphysics for a resonant frequency of 100 MHz with 40 μm wavelength on Lithium Niobate (LiNbO3) piezoelectric substrate. The optimized device structure was fabricated using thin film deposition and UV photolithography. The resonant frequency of the fabricated device (97.63 MHz) matched closely with the simulation results (100 MHz) and theoretical results (100 MHz). The device was subjected to various environmental conditions to study the influence on the resonant frequency. The SAW structure showed a resonant frequency shift of 90 KHz in steam environment, ~ 1MHz when heated to 150°C and ~120 KHz when exposed to 80% RH. The device exhibited a linear shift in resonant frequency under all tested environmental conditions with a consistent baseline and good repeatability.

physics, multidisciplinary
Acoustoelastic Guided and Surface Waves in Waveguides with Focus on Non-Destructive Testing and Structural Health Monitoring Applications —A Review of Recent Studies

Bo Zhang,Cherif Othmani,Tarek Khelfa,He Zhang,Chaofeng Lü,Anouar Njeh

DOI: https://doi.org/10.1016/j.ijnonlinmec.2024.104912

IF: 3.336

2024-01-01

International Journal of Non-Linear Mechanics

Abstract:Non-destructive testing using acoustic waves has emerged as a potential high-impact technology for improving the safety of elastic structures and reducing life-cycle costs. Although this technology has seen a number of signiﬁcant developments, normal operational conditions, such as applied stresses, may hamper its reliability in terms of defects detection. In this context, the nonlinear interactions between the mechanical stress in the materials and the acoustic waves have been studied over the years. The influence of applied stress on acoustic wave propagation is commonly termed acoustoelasticity. It is worth noting that the acoustoelastic effect property is deeply related to the acoustic modes propagation, direction of waves propagation and the material nonlinearity. Thus, understanding the acoustoelastic phenomena may be crucial to fully exploit the benefits of the non-destructive technology. For instance, since damage and applied stress cause changes on wave phase velocity, the damage-induced change should be distinguished from the stress-induced change. Meanwhile, well understanding stress-induced changes can yield the opportunities of stress measurement. To the best of the author's knowledge, there is no review on the subject of acoustoelastic effects. This paper reviews most of the corresponding studies published in recent years, with an emphasis on non-destructive testing and structural health monitoring applications. The main objective of this review paper is to collate the research performed in the area of acoustoelastic effects during the last 23 years, thereby giving a broad perspective on the state of the art in this research field. Moreover, some disputed and obscure understandings of the acoustoelastic effects are discussed, and the relationship between the initial stress and the material symmetry is examined.
Flexible Surface Acoustic Wave Devices and Its Applications in Microfluidics

University of West Scotland,He Xingli,Wang Wenbo,Hu Nana,Jin Hao,Xu Y.,Dong Shurong,Wang Demiao,Fu Y.Q.,Inst. of Renew. Energ.&Environ. Tech. Bolton University

DOI: https://doi.org/10.1557/opl.2014.33

2014-01-01

MRS Proceedings

Abstract:Flexible electronics and microsystems are an emerging technology with a tremedous impact to the future electronics and information technology and widespread applications. Various devices and microsystems have been developed. Surface acoustic wave (SAW) devices are a type of essential device for electronics, microsensors and microsystems; however there is no activity on the development of flexible SAW devices yet. This paper reports the development of flexible SAW devices on cheap, bendable and disposable plastic films. Flexible SAW devices with resonant frequency of 198.1 MHz and 447 MHz for the Rayleigh and Lamb waves respectively have been obtained with a large transmission signal up to 18dB. The flexible SAW devices have also demonstrated their ability for acoustic streaming with a velocity up to 3.4 cm/s and for particle concentration. The results have clearly demonstrated that the flexible SAW devices have great potential for applications in electronics and microsystems.
Design and Simulation of MEMS Surface Acoustic Wave Biosensor Based on PVDF Thin Film

Suraj Pattar,Rudresha K J

DOI: https://doi.org/10.22214/ijraset.2024.57920

2024-01-31

International Journal for Research in Applied Science and Engineering Technology

Abstract:Abstract: Surface acoustic wave sensors, as a class of MEMS, are widely used recently. The sensor can transform an input electrical signal into a mechanical wave which can be easily influenced by physical phenomena. Then, the changed mechanical wave is transduced back into an electrical signal. The presence of the desired phenomenon can be detected through the difference between the input and output electrical signal (amplitude, phase, frequency, or time delay). The basic surface acoustic wave device consists of a piezoelectric substrate, an input interdigitated transducer (IDT) on one side of the surface of the substrate, and a second output interdigitated transducer on the other side of the substrate.
Standing Surface Acoustic Wave-Assisted Fabrication of Region-Selective Microstructures Via User-Defined Waveguides.

Yancheng Wang,Chenyang Han,Deqing Mei

DOI: https://doi.org/10.1021/acs.langmuir.9b01565

IF: 3.9

2019-01-01

Langmuir

Abstract:Polymer-based substrate with region-selective microstructures are crucial for many biomedical applications. Here, we explored a novel method based on standing surface acoustic waves (SSAWs) for the fabrication of localized polymer-based microstructures via a predefined waveguide. When the SSAWs are excited, the generated acoustic pressure field can be controlled in a predetermined region of the fluid surface through controlling the size and shape of the waveguide geometry. On the basis of the capillary wave motion, the generated acoustic pressure field can excite microwavy patterned structures on the surface. Then with use of ultraviolet (UV) solidification, the polymer-based substrates with region-selective patterned microstructures can be successfully fabricated. Both finite element modeling and experimental studies demonstrated that the polymer substrate with different region-selective microstructures can be achieved by selecting the pairs of interdigital transducers (IDTs) and shapes of the predefined waveguides. The results showed that the proposed method is effective for fabricating polymer-based substrate with region-selective microstructures and may have potential in cell-laden chips for tissue engineering, cell-cell interactions, and other biomedical applications.
The Recent Progress of MEMS/NEMS Resonators

Lei Wei,Xuebao Kuai,Yidi Bao,Jiangtao Wei,Liangliang Yang,Peishuai Song,Mingliang Zhang,Fuhua Yang,Xiaodong Wang

DOI: https://doi.org/10.3390/mi12060724

IF: 3.4

2021-06-19

Micromachines

Abstract:MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Acoustoelectric Materials & Devices in Biomedicine

Xinyue Zhang,Yihe Zhang,Jiahe Zhang,Jian Shang,Lin Li,Qi Liu,Qi An

DOI: https://doi.org/10.1016/j.cej.2024.149314

IF: 15.1

2024-01-01

Chemical Engineering Journal

Abstract:This paper provides a comprehensive review on the acoustoelectric materials and devices in biomedicine. Prominent development has been achieved in minimally invasive medicine and high-efficacy medical treatment. Nevertheless, substantial challenges persist, encompassing sustainable power provisioning, effective drug administration, tissue regeneration, and real-time monitoring. From a foundational and material design perspective, this paper delves into the distinctive contributions and inventive solutions offered by ultrasound technology in tackling these pivotal concerns. It first discusses the fundamentals of ultrasound physics, followed by the typical ultrasound responsive TENG and PENG designs and materials. Structural design plots for flexible aoustoelectric device are then summarized. The biomedical applications of these devices are categorized and discussed. The review article furnishes a systematic documentation and timely examination of the latest advancements in relevant research fields of biomedical acoustoelectric mateirals & devices. The paper concludes with an assessment of current challenges and prospects in the field, with a view to further enhancing the precision, specificity, and system-level integration of personalized healthcare.
Wave Propagation Characteristics in A MEMS Piezoelectric Annular Plate: A Semi-analytical Study

Hassna Khalfi,Ismail Naciri,Rabab Raghib,Lahoucine Elmaimouni,Faniry Emilson Ratolojanahary,Abdellah Benami,Jiangong Yu

DOI: https://doi.org/10.1007/s40997-024-00789-4

2024-07-15

Iranian Journal of Science and Technology Transactions of Mechanical Engineering

Abstract:Our paper focuses on wave propagation in a circular annular piezoelectric plate with hexagonal elastic symmetry used in Micro-Electromechanical Systems (MEMS). The objective is to examine the properties of two piezoelectric materials: PZT-5A, a soft ceramic used in ultrasonic sensors, and PZT-4, a strong ceramic used in ultrasonic actuators. We developed the Legendre orthogonal polynomial method to obtain semi-analytical solutions for the governing equations. One strength of our method is that it can analyze the global structure using a single formalism calculation. The analysis takes into consideration the alternating current excitation and directly includes the boundary conditions into the vibration equations. As a result, we found that the limit value of voltage across the electrodes equals that can be applied to determine the maximum von Mises stress without exceeding the yield stress value of for the PZT4. The electromechanical coupling coefficient shows that the fundamental mode is the most piezoactive mode in the structure. Furthermore, we present the natural frequencies, electrical input impedance, field profiles, and dispersion curves. To validate the efficiency and accuracy of our approach, we compared our results with those obtained using voltage excitation and analytical data. Ultimately, we achieved a good agreement between them.

engineering, mechanical
Directional Multi-Resonant Micro-Electromechanical System Acoustic Sensor for Low Frequency Detection

Justin Ivancic,Fabio Alves

DOI: https://doi.org/10.3390/s24092908

2024-05-02

Abstract:This paper reports on the design, modeling, and characterization of a multi-resonant, directional, MEMS acoustic sensor. The design builds on previous resonant MEMS sensor designs to broaden the sensor's usable bandwidth while maintaining a high signal-to-noise ratio (SNR). These improvements make the sensor more attractive for detecting and tracking sound sources with acoustic signatures that are broader than discrete tones. In-air sensor characterization was conducted in an anechoic chamber. The sensor was characterized underwater in a semi-anechoic pool and in a standing wave tube. The sensor demonstrated a cosine-like directionality, a maximum acoustic sensitivity of 47.6 V/Pa, and a maximum SNR of 88.6 dB, for 1 Pa sound pressure, over the bandwidth of the sensor circuitry (100 Hz-3 kHz). The presented design represents a significant improvement in sensor performance compared to similar resonant MEMS sensor designs. Increasing the sensitivity of a single-resonator design is typically associated with a decrease in bandwidth. This multi-resonant design overcomes that limitation.
Flexible and wearable acoustic wave technologies

Jian Zhou,Yihao Guo,Yong Wang,Zhangbin Ji,Qian Zhang,Fenglin Zhuo,Jingting Luo,Ran Tao,Jin Xie,Julien Reboud,Glen McHale,Shurong Dong,Jikui Luo,Huigao Duan,Yongqing Fu

DOI: https://doi.org/10.1063/5.0142470

IF: 15

2023-05-23

Applied Physics Reviews

Abstract:Flexible and wearable acoustic wave technology has recently attracted tremendous attention due to their wide-range applications in wearable electronics, sensing, acoustofluidics, and lab-on-a-chip, attributed to its advantages such as low power consumption, small size, easy fabrication, and passive/wireless capabilities. Great effort has recently been made in technology development, fabrication, and characterization of rationally designed structures for next-generation acoustic wave based flexible electronics. Herein, advances in fundamental principles, design, fabrication, and applications of flexible and wearable acoustic wave devices are reviewed. Challenges in material selections (including both flexible substrate and piezoelectric film) and structural designs for high-performance flexible and wearable acoustic wave devices are discussed. Recent advances in fabrication strategies, wave mode theory, working mechanisms, bending behavior, and performance/evaluation are reviewed. Key applications in wearable and flexible sensors and acoustofluidics, as well as lab-on-a-chip systems, are discussed. Finally, major challenges and future perspectives in this field are highlighted.

physics, applied
Micromachined piezoelectric devices for acoustic applications

Tianling Ren,Yi Shu,Yi Yang,Changjian Zhou,Yufeng Wang,He Tian,ChangHai Zhang,Hui Sun,

DOI: https://doi.org/10.1109/EDSSC.2012.6482856

2012-01-01

Abstract:Micromachining technology has been widely used to reduce the device volume and improve the reliability. Piezoelectric devices can utilize the effects of piezoelectricity and inverse piezoelectricity to generate and detect acoustic vibration. This paper presents an overview of micromachined piezoelectric devices working in several different frequency ranges and their specific applications. The device configuration and chief fabrication process are discussed.
Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing

Carolina Viola,Davide Pavesi,Lichen Weng,Giorgio Gobat,Federico Maspero,Valentina Zega

DOI: https://doi.org/10.3390/mi15121461

IF: 3.4

2024-12-01

Micromachines

Abstract:Microelectromechanical systems (MEMSs) are attracting increasing interest from the scientific community for the large variety of possible applications and for the continuous request from the market to improve performances, while keeping small dimensions and reduced costs. To be able to simulate a priori and in real time the dynamic response of resonant devices is then crucial to guide the mechanical design and to support the MEMSs industry. In this work, we propose a simplified modeling procedure able to reproduce the nonlinear dynamics of MEMS resonant devices of arbitrary geometry. We validate it through the fabrication and testing of a cantilever beam resonator functioning in the nonlinear regime and we employ it to design a ring resonator working in the linear regime. Despite the uncertainties of a fabrication process available in the university facility, we demonstrate the predictability of the model and the effectiveness of the proposed design procedure. The satisfactory agreement between numerical predictions and experimental data proves indeed the proposed a priori design tool based on reduced-order numerical models and opens the way to its practical applications in the MEMS industry.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
A Simulated Investigation of Lithium Niobate Orientation Effects on Standing Acoustic Waves

Ranjith D Janardhana,Nathan Jackson

DOI: https://doi.org/10.3390/s23198317

2023-10-08

Abstract:The integration of high-frequency acoustic waves with microfluidics has been gaining popularity as a method of separating cells/particles. A standing surface acoustic wave (sSAW) device produces constructive interference of the stationary waves, demonstrating an increase in cell separating efficiency without damaging/altering the cell structure. The performance of an sSAW device depends on the applied input signal, design of the IDT, and piezoelectric properties of the substrate. This work analyzes the characteristics of a validated 3D finite element model (FEM) of LiNbO3 and the effect on the displacement components of the mechanical waves under the influence of sSAWs by considering XY-, YX-, and 1280 YX-cut LiNbO3 with varying electrode length design. We demonstrated that device performance can be enhanced by the interference of multiple waves under a combination of input signals. The results suggest that 1280 YX-cut LiNbO3 is suitable for generating higher-amplitude out-of-plane waves which can improve the effectiveness of acoustofluidics-based cell separation. Additionally, the findings showed that the length of the electrode impacts the formation of the wavefront significantly.
Electrical Thermal Acoustic Point Source Based On Mems Technology

Qian-Yi Xie,Zhen-Yi Ju,He Tian,Lu-Qi Tao,Yuan-Quan Chen,Mohammad A. Mohammad,Qing-Tang Xue,Xue-Yue Zhang,Yi Yang,Tian-Ling Ren

DOI: https://doi.org/10.1109/MEMSYS.2016.7421852

2016-01-01

Abstract:This work demonstrated, for the first time, an electro-thermoacoustic (ETA) point source based on Point -Contact -Structure (PCS) realized by MEMS technology based on suspended aluminum nanowires. The novel type of device improves the performance at low frequency down to 500 Hz, enhances the efficiency of ETA device by over 7 folds and widen the 3 dB range of low frequency range comparing to conventional suspended aluminum nanowires (AW) ETA devices. The highest sound pressure level (SPL) achieved by PCS acoustic device is 67 dB at 1 cm with 74 mW AC input. The novel device works in a less than +/- 3 dB fluctuation mode which is realized by the enhancement of SPL at low frequency.
Acoustoelectric materials & devices in biomedicine

Xinyue Zhang,Yihe Zhang,Jiahe Zhang,Jing Shang,Liping Lin,Qi Liu,Qi An

DOI: https://doi.org/10.1016/j.cej.2024.149314

IF: 15.1

2024-01-01

Chemical Engineering Journal

Abstract:This paper provides a comprehensive review on the acoustoelectric materials and devices in biomedicine. Prominent development has been achieved in minimally invasive medicine and high-efficacy medical treatment. Nevertheless, substantial challenges persist, encompassing sustainable power provisioning, effective drug administration, tissue regeneration, and real-time monitoring. From a foundational and material design perspective, this paper delves into the distinctive contributions and inventive solutions offered by ultrasound technology in tackling these pivotal concerns. It first discusses the fundamentals of ultrasound physics, followed by the typical ultrasound responsive TENG and PENG designs and materials. Structural design plots for flexible aoustoelectric device are then summarized. The biomedical applications of these devices are categorized and discussed. The review article furnishes a systematic documentation and timely examination of the latest advancements in relevant research fields of biomedical acoustoelectric mateirals & devices. The paper concludes with an assessment of current challenges and prospects in the field, with a view to further enhancing the precision, specificity, and system-level integration of personalized healthcare.
Mems Technologies for Rf Communications

Q Wu,XW Liu,B Kim

DOI: https://doi.org/10.1117/12.425311

2001-01-01

Abstract:Microelectromechanical system (MEMS) represents an exciting new technology derived from the same fabricating processes used to make integrated circuits. The trends of growing importance of the wireless communications market is toward the system with minimal size, cost and power consumption. For the purpose of MEMS R&D used for wireless communications, a history and present situation of MEMS device development are reviewed in this paper, and an overview of MEMS research topics on RF communication applications and the state of the art technologies are also presented here.

Acoustic Wave Based MEMS Devices, Development and Applications

Microwave Acoustic Wave Devices: Recent Advances on Architectures, Modeling, Materials, and Packaging

Progress of MEMS acoustic emission sensor: a review

Micro/nano Acoustofluidics: Materials, Phenomena, Design, Devices, and Applications.

Acoustic Biosensors and Microfluidic Devices in the Decennium: Principles and Applications

Design Optimization of Surface Acoustic Wave Devices and Investigation of Fabricated Devices under Temperature, Humidity and Steam Environments

Acoustoelastic Guided and Surface Waves in Waveguides with Focus on Non-Destructive Testing and Structural Health Monitoring Applications —A Review of Recent Studies

Flexible Surface Acoustic Wave Devices and Its Applications in Microfluidics

Design and Simulation of MEMS Surface Acoustic Wave Biosensor Based on PVDF Thin Film

Standing Surface Acoustic Wave-Assisted Fabrication of Region-Selective Microstructures Via User-Defined Waveguides.

The Recent Progress of MEMS/NEMS Resonators

Acoustoelectric Materials &amp; Devices in Biomedicine

Wave Propagation Characteristics in A MEMS Piezoelectric Annular Plate: A Semi-analytical Study

Directional Multi-Resonant Micro-Electromechanical System Acoustic Sensor for Low Frequency Detection

Flexible and wearable acoustic wave technologies

Micromachined piezoelectric devices for acoustic applications

Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing

A Simulated Investigation of Lithium Niobate Orientation Effects on Standing Acoustic Waves

Electrical Thermal Acoustic Point Source Based On Mems Technology

Acoustoelectric materials & devices in biomedicine

Mems Technologies for Rf Communications

Acoustoelectric Materials & Devices in Biomedicine