Micromachined piezoelectric devices for acoustic applications

Tianling Ren,Yi Shu,Yi Yang,Changjian Zhou,Yufeng Wang,He Tian,ChangHai Zhang,Hui Sun,
DOI: https://doi.org/10.1109/EDSSC.2012.6482856
2012-01-01
Abstract:Micromachining technology has been widely used to reduce the device volume and improve the reliability. Piezoelectric devices can utilize the effects of piezoelectricity and inverse piezoelectricity to generate and detect acoustic vibration. This paper presents an overview of micromachined piezoelectric devices working in several different frequency ranges and their specific applications. The device configuration and chief fabrication process are discussed.
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