Abstract:Abstract: Surface acoustic wave sensors, as a class of MEMS, are widely used recently. The sensor can transform an input electrical signal into a mechanical wave which can be easily influenced by physical phenomena. Then, the changed mechanical wave is transduced back into an electrical signal. The presence of the desired phenomenon can be detected through the difference between the input and output electrical signal (amplitude, phase, frequency, or time delay). The basic surface acoustic wave device consists of a piezoelectric substrate, an input interdigitated transducer (IDT) on one side of the surface of the substrate, and a second output interdigitated transducer on the other side of the substrate.

Design and Simulation of MEMS Surface Acoustic Wave Biosensor Based on PVDF Thin Film