Package-less liquid phase sensing using surface acoustic waves on lithium tantalate oxide

David Rabus,Lilia Arapan,Jean-Michel Friedt,Vincent Luzet,Frédéric Chérioux
DOI: https://doi.org/10.1109/tuffc.2024.3366559
2024-01-01
Abstract:Surface acoustic wave transducers propagating shear waves are compatible with sensing chemical compounds in a liquid phase. However, if the liquid surrounding the sensor possesses a higher permittivity than the piezoelectric substrate, then the interdigitated electrodes for converting the incoming electromagnetic wave to acoustic waves is susceptible to capacitive short-circuiting, leading to excessive insertion losses. By using high-permittivity lithium tantalate oxide, we demonstrate chemical sensing in water without the need for dedicated microfluidic packaging. Nevertheless, the gravimetric sensitivity of these package-less transmission Love mode delay lines remains comparable to that of low-permittivity quartz when appropriately tuning the guiding layer thin film to confine energy to the surface in a Love mode. We extend the transmission line gravimetric sensitivity measurement to a reflective delay line geometry for passive transducers that can be wirelessly probed. For instance, Ground Penetrating RADAR can be used for sub-surface sensing, here targeting water pollution detection, operating in the 100 to 500 MHz range. This center frequency was selected as a tradeoff between penetration depth (lower frequency) and antenna size (smaller at higher frequency). Non specific binding of proteins detection is shown in the context of biosensing applications.
engineering, electrical & electronic,acoustics
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