Development of piezoelectric microcantilever flow sensor with wind-driven energy harvesting capability

Huicong Liu,Songsong Zhang,Ramprakash Kathiresan,Takeshi Kobayashi,Chengkuo Lee
DOI: https://doi.org/10.1063/1.4723846
IF: 4
2012-05-28
Applied Physics Letters
Abstract:We have developed a piezoelectric (PZT) microcantilever as an air flow sensor and a wind-driven energy harvester for a self-sustained flow-sensing microsystem. A flow sensing sensitivity of 0.9 mV/(m/s) is obtained. The output voltage and optimized power regarding to the load resistance of 100 kΩ are measured as 18.1 mV and 3.3 nW at flow velocity of 15.6 m/s, respectively. The corresponding power density is as large as 0.36 mW/cm3. The experimental results have elucidated the smart function of using PZT microcantilevers as flow-sensors and wind-driven energy harvesters simultaneously.
physics, applied
What problem does this paper attempt to address?