3.2-MP Back-Illuminated Polarization Image Sensor With Four-Directional Air-Gap Wire Grid and 2.5- $\mu$ m Pixels

Yasushi Maruyama,Takashi Terada,Tomohiro Yamazaki,Yusuke Uesaka,Motoaki Nakamura,Yoshihisa Matoba,Kenta Komori,Yoshiyuki Ohba,Shinichi Arakawa,Yasutaka Hirasawa,Yuhi Kondo,Jun Murayama,Kentaro Akiyama,Yusuke Oike,Shuzo Sato,Takayuki Ezaki
DOI: https://doi.org/10.1109/ted.2018.2829190
IF: 3.1
2018-06-01
IEEE Transactions on Electron Devices
Abstract:A 3.2-MP four-directional polarization image sensor with air-gap wire-grid polarizer is described. The image sensor was fabricated using a wafer process and incorporates back-illumination and an antireflection layer to minimize optical flaring and ghosting problems. In testing, the sensor achieved a polarization transmittance of 63.3% and an extinction ratio of 85 at 550 nm, thereby outperforming conventional polarization sensors. The proposed sensor also exhibited good oblique-incidence characteristics, even with small polarization pixels of $2.5~mu ext{m}$ . Based on these results, the proposed image sensor is suitable for various megapixel fusion-imaging applications, such as reducing surface reflections, highly accurate depth mapping, and condition-robust surveillance.
engineering, electrical & electronic,physics, applied
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