Abstract:One of the most important limitations of the atomic force microscopy (AFM) is scanning speed, whose high values are required for contemporary high-resolution, long-range diagnostic applications. The measurement bandwidth of an AFM depends on several factors, but usually results from the time constant of the oscillating cantilever, which is correlated with its resonance frequency and quality factor. We propose a method to overcome this problem by performing the surface measurements when the cantilever is vibrating in higher eigenmodes. In this paper we demonstrate the application of active piezoresistive cantilevers operating in this mode. The active piezoresistive cantilever comprises a piezoresistive deflection sensor, a deflection actuator and a nanotip. It is a complete micro-electro-mechanical system (MEMS), ensuring the highest reliability of cantilever vibration control and detection. Higher eigenmode operations are usually difficult to implement as they usually result in lower deflection and lower sensitivity of the probe vibration deflection. Here we present an experimental modification of the structure of an active piezoresistive cantilever using focused ion beam (FIB) machining that mitigates both weaknesses. This has enabled the cantilever to scan the surface at a scanning rate of 10 lines/s with a maximum speed of 500 μm/s and a data acquisition rate of 10 kS/s, when the probe is vibrating at 380 kHz in the second eigenmode. We also describe a traceable calibration routine (based on analysis of the response of the piezoresistive detector, the output of the HeNe interferometer and precise control of the deflection actuator), together with the cantilever modification process and the development of the measurement setup. We show measurement results of dedicated calibration samples and silicon carbide crystal lattice references.

Plate geometries for contact resonance atomic force microscopy: Modeling, optimization, and verification

Improved Sensitivity for Subsurface Imaging by Contact Resonance Atomic Force Microscopy Using Fano Peaks

Molecular Dynamics Simulation of Form Measurement Process of Soft Materials Using Atomic Force Microscope

Measurement of Sub-Surface Microstructures Based on a Developed Ultrasonic Atomic Force Microscopy

Contact stiffness of finite size subsurface defects for atomic force microscopy: Three-dimensional finite element modeling and experimental verification

A New Type of Atomic Force Microscope System Based on Plate Scanner

Contact resonance atomic force microscopy using long elastic tips

A Stitching Method for AFM Based Large Scale Scanning with High Resolution

A Novel Atomic Force Microscope Operating in Liquid with Open Probe Unit and Optimized Laser Tracking System

A comprehensive study of AFM stiffness measurements on inclined surfaces: theoretical, numerical, and experimental evaluation using a Hertz approach

Enhancing higher-order modal response in multifrequency atomic force microscopy with a coupled cantilever system

Finite Element Modelling of Atomic Force Microscopy Imaging on Deformable Surfaces

Subsurface imaging of flexible circuits via contact resonance atomic force microscopy

Photothermally Excited Contact Resonance Imaging in Air and Water

Large colloidal probes for atomic force microscopy: Fabrication and calibration issues

Quantification of surface displacements and electromechanical phenomena via dynamic atomic force microscopy

A Novel Topography and Elasticity Synchronous Measure Approach With an AFM

Flexible Helicoids, Atomic Force Microscopy (AFM) Cantilevers in High Mode Vibration, and Concave Notch Hinges in Precision Measurements and Research

Hyperelastic Microcantilever AFM: Efficient Detection Mechanism Based on Principal Parametric Resonance

Application of active piezoresistive cantilevers in high-eigenmode surface imaging

Optimizing the Laser Spot Positioning on Tailored Microcantilevers Used in Atomic Force Microscopy