Oxide Two‐Dimensional Electron Gas with High Mobility at Room‐Temperature

Kitae Eom,Hanjong Paik,Jinsol Seo,Neil Campbell,Evgeny Y. Tsymbal,Sang Ho Oh,Mark S. Rzchowski,Darrell G. Schlom,Chang‐Beom Eom
DOI: https://doi.org/10.1002/advs.202105652
IF: 15.1
2022-02-20
Advanced Science
Abstract:The prospect of 2-dimensional electron gases (2DEGs) possessing high mobility at room temperature in wide-bandgap perovskite stannates is enticing for oxide electronics, particularly to realize transparent and high-electron mobility transistors. Nonetheless only a small number of studies to date report 2DEGs in BaSnO<sub>3</sub> -based heterostructures. Here, 2DEG formation at the LaScO<sub>3</sub> /BaSnO<sub>3</sub> (LSO/BSO) interface with a room-temperature mobility of 60 cm<sup>2</sup>  V<sup>-1</sup>  s<sup>-1</sup> at a carrier concentration of 1.7 × 10<sup>13</sup>  cm<sup>-2</sup> is reported. This is an order of magnitude higher mobility at room temperature than achieved in SrTiO<sub>3</sub> -based 2DEGs. This is achieved by combining a thick BSO buffer layer with an ex situ high-temperature treatment, which not only reduces the dislocation density but also produces a SnO<sub>2</sub> -terminated atomically flat surface, followed by the growth of an overlying BSO/LSO interface. Using weak beam dark-field transmission electron microscopy imaging and in-line electron holography technique, a reduction of the threading dislocation density is revealed, and direct evidence for the spatial confinement of a 2DEG at the BSO/LSO interface is provided. This work opens a new pathway to explore the exciting physics of stannate-based 2DEGs at application-relevant temperatures for oxide nanoelectronics.
materials science, multidisciplinary,nanoscience & nanotechnology,chemistry
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