Flexible Multilayered PDMS Optical Waveguide Vibration Sensors Based on Subwavelength Gratings
Wang Shaohe,Lin Weiqiang,Wu Peijin,Li Chen,Ye Zhicheng
DOI: https://doi.org/10.3788/aos240451
2024-01-01
Acta Optica Sinica
Abstract:Objective Vibration sensors are widely used for security monitor in various industries, including industrial, electric power, bridges, and transportation. Traditional vibration sensors such as piezoelectric and piezoresistive types offer high sensitivity, but they are susceptible to electromagnetic interference and require a rigid installation environment. In contrast, optical vibration sensing is gaining attention due to its immunity to electromagnetic interference, flexibility in arrangement, and suitability for remote monitoring. Fiber-typed Bragg-grating is a typical device among optical vibration sensing techniques, however, the strong mutual coupling among temperature, humidity, and vibration signals hinders their applicability. In response to these challenges, we propose a flexible multilayered PDMS-TiO2-PDMS (PTP) optical waveguide vibration sensor based on subwavelength gratings. The sensing mechanism is achieved by measuring the waveguide mode resonance wavelength shifts corresponding to the change of grating pitch induced by vibration. This sensor demonstrates excellent stability, high sensitivity, and high resistance to temperature and humidity, presenting a promising avenue for advancing optical vibration sensing applications. Methods Theoretically, we deduce the vibration sensing principle based on inertial characteristics, elucidating the relationship between the reflective peak wavelengths and the period of the grating. The equivalent refractive index of the grating layer based on guiding mode resonance is obtained. By leveraging guiding mode resonance, we derive the waveguide mode resonant reflective peak wavelength corresponding to vibration acceleration. Subsequently, optical vibration sensors based on PTP grating waveguide structure are designed. Along the direction perpendicular to the grating, one end of the PTP structure is fixed on a frame, and the other end is connected to a mass block and a spring, where the spring is fixed on the frame. Finite element method (FEM) is employed to optimize the structure parameters and maximize the figure of merit of the resonant reflective peaks and transmitted dips. The devices are fabricated by using consecutive processes including module template transfer, high refractive index film deposition, and film lamination capsule. The surface morphology of the single-layer PDMS (TiO2-PDMS) grating structure coated with TiO2 and the cross of the PTP structure are analyzed by using scanning electron microscope (SEM). Static and dynamic experiments are conducted to evaluate the performance of the sensor and to validate its feasibility in practical applications. Results and Discussions The PTP grating optical waveguide vibration sensor presents sensitive spectra shifts to the vibration and high stability against temperature and humidity variation. In the range of Young modulus of 1.70 to 2.46 MPa, a shift up to 13.97 nm of resonant wavelength for 1% deformation, corresponding to the strain range of -3.15% to 8.10%, the stress range of -79.48 to 161.90 kPa, and theoretical vibration acceleration of -362.22 to 890.69 m/s(2) are obtained as shown in Fig. 9. Moreover, the sensor exhibits stability under temperature fluctuations from 15 to 50 degrees C and humidity variations from 50% to 85%. Practical testing on an electric power circuit breaker confirms the effectiveness of the sensor in vibration measurement. According to the change of resonance wavelength (609-632 nm), a vibration acceleration ranging from -100 to 80 m/s(2) is deduced as shown in Fig. 11. These results validate the feasibility and robustness of the proposed device structure for optical-typed vibration sensing applications. Conclusions In this work, we have developed a flexible multilayered PTP optical waveguide vibration sensor based on subwavelength grating, addressing the issues of traditional sensors in terms of environmental stability, parameter complexity, and signal sensitivity. The sensing mechanism between the vibration and the deformation of the flexible PDMS is investigated. The PTP optical waveguide structure is designed utilizing the guiding mode resonance and equivalent medium refractive index theorem. Through the electromagnetic wave finite element method, the change law of the resonant reflection spectral of the grating under deformation is illustrated, and the obvious spectral signal is obtained by optimizing the structure parameters. In the experiments, the flexible PTP grating optical waveguide with desired Young modulus is fabricated by PDMS proportional control, template replication process, high refractive index film coating, film lamination package, and sensor assembling to facilitate the vibration-induced deformation of the grating pitch. A sequence of static performance and dynamic vibration response tests are carried out. Under the measured Young modulus ranging from 1.70 to 2.46 MPa, when the stress range is -79.48 to 161.90 kPa, the strain range is -3.15% to 8.10%, and the spectra sensitivity to the strain is 13.97 nm/%. The vibration acceleration range of -362.22 to 890.69 m/s(2) is deduced from the measurements. The high stability of the sensing to the temperature and humidity changes is verified. By both theoretical modeling and experimental testing, the potential of the device in practical applications is demonstrated. The robustness, high sensitivity, and resistance to environmental factors of the proposed PTP sensor make it a promising candidate for optical-typed vibration sensing in wide industrial scenarios.