Abstract:Energetic processing methods such as hyperthermal implantation hold special promise to achieve the precision synthesis of metastable two-dimensional (2D) materials such as Janus monolayers; however, they require precise control. Here, we report a feedback approach to reveal and control the transformation pathways in materials synthesis by pulsed laser deposition (PLD) and apply it to investigate the transformation kinetics of monolayer WS2 crystals into Janus WSSe and WSe2 by implantation of Se clusters with different maximum kinetic energies (<42 eV/Se-atom) generated by laser ablation of a Se target. Real-time Raman spectroscopy and photoluminescence are used to assess the structure, composition, and optoelectronic quality of the monolayer crystal as it is implanted with well-controlled fluxes of selenium for different kinetic energies that are regulated with in situ ICCD imaging, ion probe, and spectroscopy diagnostics. First-principles calculations, XPS, and atomic-resolution HAADF STEM imaging are used to understand the intermediate alloy compositions and their vibrational modes to identify transformation pathways. The real-time kinetics measurements reveal highly selective top-layer conversion as WS2 transforms through WS2(1-x)Se2x alloys to WSe2 and provide the means to adjust processing conditions to achieve fractional and complete Janus WSSe monolayers as metastable transition states. The general approach demonstrates a real-time feedback method to achieve Janus layers or other metastable alloys of the desired composition, and a general means to adjust the structure and quality of materials grown by PLD, addressing priority research directions for precision synthesis with real-time adaptive control.

Mass spectrometer controlled electron beam evaporation synthesis of multilayered materials

An evaporation source for ion beam assisted deposition in ultrahigh vacuum

Development of an advanced in-line multilayer deposition system at Diamond Light Source

Construction and evaluation of an ultrahigh-vacuum-compatible sputter deposition source

Combinatorial Laser Molecular Beam Epitaxy System Integrated with Specialized Low-temperature Scanning Tunneling Microscopy

A new system for sample synthesis, preparation and modification combined with in-situ depth profiling using medium energy ions

Automatic Electron-Beam Deposition Of Multilayer Soft X-Ray Coatings With Laterally Graded D-Spacing

An ultra-flexible modular high vacuum setup for thin film deposition

Characterization and Application of Materials Grown by Electron-Beam-Induced Deposition

A low-temperature scanning probe microscopy system with molecular beam epitaxy and optical access

Level set simulation of focused ion beam sputtering of a multilayer substrate

An upgraded ultra-high vacuum magnetron-sputtering system for high-versatility and software-controlled deposition

An integrated ultra-high vacuum cluster for atomic-scale deposition, interface regulation, and characterization of spintronic multilayers

Real-Time Diagnostics of 2D Crystal Transformations by Pulsed Laser Deposition: Controlled Synthesis of Janus WSSe Monolayers and Alloys.

Thin film and surface preparation chamber for the low energy muons spectrometer

In Situ Time-of-Flight Mass Spectrometry of Ionic Fragments Induced by Focused Electron Beam Irradiation: Investigation of Electron Driven Surface Chemistry inside an SEM under High Vacuum

Pulsed laser deposition with simultaneous in situ real-time monitoring of optical spectroscopic ellipsometry and reflection high-energy electron diffraction

Construction of Molecular Beam Epitaxy and Multi-Probe Scanning Tunneling Potentiometry Combined System

Geometry of Chemical Beam Vapor Deposition System for Efficient Combinatorial Investigations of Thin Oxide Films: Deposited Film Properties versus Precursor Flow Simulations

Preparation of multilayer samples for scanning thermal microscopy examination

High Throughput Oxide Lattice Engineering by Parallel Laser Molecular Beam Epitaxy and Concurrent X-ray Diffraction