Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate

Ahmed Emad,Ruochen Lu,Ming-Huang Li,Yansong Yang,Tao Wu,Songbin Gong

DOI: https://doi.org/10.1109/memsys.2019.8870894

2019-01-01

Abstract:This paper reports the first torsional micro-actuator using a lithium niobate (LiNbO3, 36° Y-cut) thin film with a record-high figure of merit ($mathrm{FoM}= heta_{opt}cdot ext{mirror dimension}cdot mathrm{frequency}$) of 1582 °·mm·kHz at a resonance frequency of 1.268 MHz. The large piezoelectric coefficients and high-quality factors of single crystal LiNbO3 have been exploited to enable high coupling torsional actuation. The fabricated actuator has a mirror size of $22mathrm{x}40 mu mathrm{m}^{2}$, and quality factors of 547 and 1497 in air and vacuum respectively. Moreover, the optical angle can exceed $31^{circ} ( heta_{opt}= 4cdot heta_{mech})$ in both air and vacuum, leading to an FoM surpassing state-of-the-art high-frequency scanners. Our demonstration has shown great potential for scanning micro-mirrors, and light detection and ranging systems (LIDAR) applications where frequency scalability, scanning angles, and footprint are the main challenges.