Modeling of carrier scattering in MOS inversion layers with large density of interface states and simulation of electron Hall mobility in 4H-SiC MOSFETs

Hajime Tanaka,Nobuya Mori
DOI: https://doi.org/10.35848/1347-4065/ab7271
IF: 1.5
2020-03-01
Japanese Journal of Applied Physics
Abstract:We formulate scattering mechanisms in quasi-two-dimensional systems with a large density ofinterface states such as 4H-SiC MOS interfaces, and calculate the electron Hall mobility in 4H-SiCMOS inversion layers by Monte Carlo simulation. In addition to phonon, ionized impurity, and surfaceroughness scattering, we take account of Coulomb scattering by the electrons trapped at theinterface states and the interface fixed charges and scattering by electrically neutral defects.Considering that the number of trapped electrons can be comparable to or larger than that of mobileelectrons, the trapped electrons are assumed to contribute to screening as well as scattering. Usingthe developed model, we analyze the dependence of Hall mobility in 4H-SiC MOS inversion layers onthe body acceptor density, temperature, and interface state density. Our calculation reasonablyreproduces the experimental behaviors of Hall mobility. We also discuss the physical mechanismsunderlying the obtain...
physics, applied
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