A ring-shaped linear ultrasonic motor based on PSN-PMS-PZT ceramic

Xudong Xin,Yang Yu,Jingen Wu,Xiangyu Gao,Zhanmiao Li,Xingyu Yi,Wanping Chen,Shuxiang Dong
DOI: https://doi.org/10.1016/j.sna.2020.112036
2020-07-01
Abstract:<p>In this work, we propose a novel ring-shaped linear ultrasonic motor operating in either <em>E<sub>01,a</sub></em> or <em>E<sub>01,b</sub></em> mode (orthogonal mode). The motor is fabricated using a self-made high-performance PSN-PMS-PZT ceramic with the optimal composition, which has a high vibration velocity of 0.86 m/s (rms value) at resonance. The vibration velocity is about twice that of a commercialized hard Pb(Zr,Ti)O<sub>3</sub> ceramic. Experimental results show that our proposed motor performs much better linear motion symmetricity in two directions comparing to previously reported linear ultrasonic motors. It exhibits a fast moving speed of 248 mm/s, a relatively large driving force of 2.6 N, and a high positioning precision of 0.2 μm in open-loop control, indicating that the proposed linear motor based on self-made PSN-PMS-PZT ceramic has great potential applications for precise actuations.</p>
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