Surface morphology change of protective film on collector mirror related to implantation of Sn emitted from laser produced plasma in EUV light source

Yoshiyuki Honda,Tatsuya Yanagida,Yutaka Shiraishi,Masayuki Morita,Masahiko Andou,Hiroaki Tomuro,Akifumi Matsuda,Mamoru Yoshimoto
DOI: https://doi.org/10.35848/1882-0786/abbea3
IF: 2.819
2020-10-15
Applied Physics Express
Abstract:The change in surface morphology of an amorphous TiO 2 protective film coated on a Mo/Si multilayerof an extreme ultraviolet (EUV) light collector mirror has been investigated. After long-timeoperation of an EUV light source, many pinholes of about 10 nm diameter were observed on theprotective TiO 2 film surface. Accelerated aging tests with thin film samples that simulated surfaceconditions on the collector mirror suggest that crystallization of the protective film induced by Snimplantation is the main cause of the formation of the observed pinholes.
physics, applied
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