Modeling, optimization and comprehensive comparative analysis of 7nm FinFET and 7nm GAAFET devices

Rakesh Yerragopu,J. K. Kasthuribha,Dr. P. Aruna Priya
DOI: https://doi.org/10.1063/5.0027162
2020-01-01
Abstract:From the past decade to modern era, new technology nodes have overcome many challenges from previous nodes in order to achieve Moore's Law. Modelling Various architectures with different parameters to achieve high channel current and low offset leakage current is crucial. In this work, a new 7nm GAAFET and 7nm TRIGATE FinFET device design were modelled. 2-types of FinFET's, Short Gate FinFET (SGFinFET), Independent Gate FinFET (IGFinFET) and single channel GAAFET, Multi-Channel GAAFET Mode models were designed and compared using Sentaurus TCAD. Using high dielectric materials such as SiO2 and HfO2 as oxide materials, and increasing doping profile of fin reduces short channel effects. Short Channel Effects like Subthreshold slope, Transconductance, drain induced barrier lowering were analyzed and compared with various designs. Simulation results demonstrate the benefit of 7nm GAAFET over 7nm FinFET.
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