Batch fabricated thin-film electrodes for stimulation of the central auditory system

D.J. Anderson,K. Najafi,S.J. Tanghe,D.A. Evans,K.L. Levy,J.F. Hetke,X. Xue,J.J. Zappia,K.D. Wise

DOI: https://doi.org/10.1109/10.32101

IF: 4.6

1989-07-01

IEEE Transactions on Biomedical Engineering

Abstract:Silicon micromachining and thin-film technology have been employed to fabricate iridium stimulating arrays which can be used to excite discrete volumes of the central nervous system. Silicon multichannel probes with thicknesses ranging from 1 to 40 microns and arbitrary two-dimensional shapes can be fabricated using a high-yield, circuit-compatible process. Iridium stimulating sites are shown to have similar characteristics to iridium wire electrodes. Accelerated pulse testing with over 8 million 100 microA biphasic current pulses on 8000 microns 2 sites has demonstrated the long-term stability of iridium and activated iridium sites. In vivo tests have been performed in the central auditory pathways to demonstrate neural activation using the devices. These tests show a selective activation both as a function of site separation and site size.

engineering, biomedical