Abstract:This paper introduces an innovative transceiver integrated with high-performance piezoelectric micromachined ultrasonic transducers (PMUTs) array, specifically designed for breast cancer imaging. The PMUTs array is meticulously partitioned into drive and detection sections, optimizing the size ratios of the top electrodes within a transduction cell. In this configuration, the outer drive electrode facilitates ultrasonic wave transmission, while the detection electrode concurrently receives signals, enhancing both sensitivity and reducing the overall size of the breast cancer ultrasound imaging system. The sensor dimensions of the scandium-doped aluminum nitride (ScxAl1-xN, x=9.5%)-based PMUTs array are compact, measuring 3.2 mm x 3.2 mm. Thorough characterization of the packaged PMUTs array is conducted using an industry-standard calibration instrument. Notably, the reported PMUTs array achieves an impressive receiving sensitivity of -162 dB (re: 1 V/mu Pa) with a 40 dB gain, a transmitting sensitivity of 156 dB (re: 1 mu Pa/V), and a maximum drive nonlinearity of 0.21% at the resonant frequency. Comparative analysis with state-of-the-art commercially available transducers underscores the excellence of the transceiver integrated PMUTs array for breast cancer imaging applications. The outstanding performance and the integration of the transceiver design contribute to a significantly reduced footprint, rendering the reported integrated transceiver PMUTs array highly valuable for portable breast cancer imaging devices with promising commercial prospects.

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