Optimization and Characterization of Modified Cold Grid Cathode Penning Ion Source

S. M. Mahmoud,A. M. Abdel Reheem,H. M. El-Sayed,H. El-Khabeary
DOI: https://doi.org/10.1007/s11090-021-10187-2
2021-06-02
Plasma Chemistry and Plasma Processing
Abstract:In this study, a modified cold grid cathode penning ion source is constructed and characterized; to obtain a high stream of nitrogen ions. The effect of four samarium cobalt permanent magnet rods on the output ion beam current is studied using argon gas. The output ion beam current at different pressures and grid cathode diameters are measured using nitrogen gas. It is found that at the optimum grid cathode diameter equal to 14 mm, pressure equal to 9 × 10–4 mbar, and discharge current equal to 1.8 mA, a maximum output ion beam current is equal to 220 μA using nitrogen gas. Also, the output ion beam current is measured at different pressures and optimum grid cathode diameter using argon and hydrogen gases. The effect of applied negative extraction voltages on the extracted ion beam current at the optimum parameters was determined using argon, hydrogen, and nitrogen gases.
engineering, chemical,physics, fluids & plasmas, applied
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