The Effect of the Process Conditions on the Synthesis of Zirconium-Aluminum Oxide Thin Films Prepared by Ultrasonic Spray Pyrolysis

M. Bizarro,J. C. Alonso,A. Ortiz

DOI: https://doi.org/10.1149/1.2039607

IF: 3.9

2005-01-01

Journal of The Electrochemical Society

Abstract:Zirconium-aluminum oxide thin films with different aluminum/zirconium ratios (Al∕Zr) have been prepared by ultrasonic spray pyrolysis, using metallic acetylacetonates as source materials. The effect of variations of substrate temperature (Ts) , carrier gas flow rate (Fg) , and aluminum concentration in the start solution [(Al∕Zr)s] on the Al∕Zr ratio, the deposition rate (Rd) , and refractive index of deposited films is analyzed. The Al∕Zr ratio increases when the Ts and [(Al∕Zr)s] ratios increase, but it diminishes as Fg is augmented. Moreover, Rd grows when the deposition parameters are incremented. Refractive index acquires values around 1.85 in all cases. X-ray photoelectron spectroscopy results indicate that the Zr 3d and O 1s core levels shift toward low binding energies when aluminum is incorporated. The location of line Al 2p and its symmetry indicates that aluminum atoms are completely oxidized, forming a ternary oxide with zirconium atoms. Infrared transmittance spectra show small absorption bands related with Zr–O and Al–O bonds in a ternary (ZrAlO) oxide. X-ray diffraction spectra show that all the films containing aluminum are amorphous, except that deposited at the highest Ts . In all other studied cases the films are amorphous. The dielectric constant has values between 11.84 and 20.96 depending on the deposition conditions.

electrochemistry,materials science, coatings & films