Abstract:Heteroleptic bis(tert-butylimido)bis(N,N′-diisopropylacetamidinato) compounds of molybdenum and tungsten are introduced as precursors for atomic layer deposition of tungsten and molybdenum oxide thin films using ozone as the oxygen source. Both precursors have similar thermal properties but exhibit different growth behaviors. With the molybdenum precursor, high growth rates up to 2 Å/cycle at 300 °C and extremely uniform films are obtained, although the surface reactions are not completely saturative. The corresponding tungsten precursor enables saturative film growth with a lower growth rate of 0.45 Å/cycle at 300 °C. Highly pure films of both metal oxides are deposited, and their phase as well as stoichiometry can be tuned by changing the deposition conditions. The WOx films crystallize as γ-WO3 at 300 °C and above, whereas the films deposited at lower temperatures are amorphous. Molybdenum oxide can be deposited as either amorphous (≤250 °C), crystalline suboxide (275 °C), a mixture of suboxide and α-MoO3 (300 °C), or pure α-MoO3 (≥325 °C) films. MoOx films are further characterized by synchrotron photoemission spectroscopy and temperature-dependent resistivity measurements. A suboxide MoOx film deposited at 275 °C is demonstrated to serve as an efficient hydrogen gas sensor at a low operating temperature of 120 °C.

Preparation of WC x Thin Films by RF Sputtering and Their Electrocatalytic Property for Anodic Methanol Oxidation

Ultrasmall and phase-pure W 2 C nanoparticles for efficient electrocatalytic and photoelectrochemical hydrogen evolution.

Electrocatalytic Properties of Nano-Crystalline Tungsten Carbide Thin Film Electrode for Nitromethane Electroreduction

Combined Experimental and Theoretical Assessment of WXy (X = C, N, S, P) for Hydrogen Evolution Reaction

Influence of CH4partial Pressure on the Microstructure of Sputter-Deposited Tungsten Carbide Thin Films

Mesoporous WCx Films with NiO-Protected Surface: Highly Active Electrocatalysts for the Alkaline Oxygen Evolution Reaction

Nanorod Tungsten Carbide Thin Film and Its Electrocatalytic Activity for Nitromethane Electroreduction

Microstructure and Electrochemical Properties for WC/a-C Coatings As ECG Dry Bioelectrodes

ZIF-8-derived Carbon-Thin-layer Protected WC/W24O68 Micro-Sized Rods with Enriched Oxygen Vacancies As Efficient Pt Co-Catalysts for Methanol Oxidation and Oxygen Reduction

Preparation of Pt/multiwalled Carbon Nanotubes Modified Au Electrodes Via Pt–Cu Co-Electrodeposition/cu Stripping Protocol for High-Performance Electrocatalytic Oxidation of Methanol

Tungsten carbide nanofibers prepared by electrospinning with high electrocatalytic activity for oxygen reduction

Ultrathin Pt3Pb nanowires prepared in aqueous phase for enhanced methanol electrooxidation

Electro‐Catalytic Oxidation of Methanol Catalyzed by Facet‐Controlled Pt‐WC Nanoparticles on In Situ Synthesized Carbon Nanotubes

Direct Regulation of O/W Stoichiometric Ratio and Microstructure in Tungsten Oxide Electrochromic Films by Ar Pressure Using Oxide Target Sputtering

An amorphous WC thin film enabled high-efficiency N 2 reduction electrocatalysis under ambient conditions

MOF-assisted construction of mesoporous tungsten carbide as superior Pt-based catalyst support for methanol electro-oxidation

Ultrasonically Treated Multi-Walled Carbon Nanotubes (mwcnts) As PtRu Catalyst Supports for Methanol Electrooxidation

Atomic Layer Deposition of Molybdenum and Tungsten Oxide Thin Films Using Heteroleptic Imido-Amidinato Precursors: Process Development, Film Characterization, and Gas Sensing Properties

Novel Graphite-Carbon Encased Tungsten Carbide Nanocomposites by Solid-State Reaction and Their ORR Electrocatalytic Performance in Alkaline Medium

Effect of W on activity of Pt–Ru/C catalyst for methanol electrooxidation in acidic medium

An amorphous WC thin film enabled high-efficiency N<sub>2</sub> reduction electrocatalysis under ambient conditions