Damage‐Free Depth Profiling of Electronic Structures in Multilayered Organic Semiconductors by Photoelectron Spectroscopy and Cluster Ion Beam

Juntao Hu,Dengke Wang,Peicheng Li,Nan Chen,Tao Zhang,Yan Wu,Di Wu,Yongbiao Zhao,Qiang Zhu,Zewei Fu,Zheng-Hong Lu
DOI: https://doi.org/10.1002/pssb.202100130
2021-09-06
physica status solidi (b)
Abstract:The chemical and electronic properties of various functional layers are known to dictate the performance of organic semiconductor devices. Gas cluster ion beam (GCIB) is developed for sputter removal layer-by-layer of molecular materials from surfaces. It is not clear, however, whether or not GCIB sputter can leave a fresh organic surface damage-free so that the true chemical and electronic properties can be measured. In this paper, X-ray photoelectron spectroscopy (XPS) and ultra-violet photoelectron spectroscopy (UPS) are used to probe the chemical and electronic structures of organic semiconductors bombarded by GCIB. We find that the highest occupied molecular orbitals (HOMOs) measured by UPS are very sensitive to ion-beam damages, whereas the XPS measured core levels show little change. It is therefore essential to use UPS measured HOMOs for determining if cluster ion-beams can produce an organic surface without damaging its chemical and electronic properties. Of all combinations of cluster size and beam energy, it is found that 4 keV 2000 Ar ion cluster can produce a fresh damage-free organic surface. Applying this GCIB beam to sputter removal layer-by-layer of stacked organic semiconductor films comprising tris(8-hydroxy-quinoline) aluminum (Alq3)/N,N'-bis-(1-naphthyl)-N,N'-diphenyl-1,1'-biphenyl-4,4'-diamine (NPB)/Alq3, we show that the chemical and electronic structures of the bulk materials and buried interfaces can be measured. This paper demonstrates that photoelectron spectroscopy (PES) combined with GCIB can be used to construct chemical and electronic structures of various functional layers in operating organic devices.This article is protected by copyright. All rights reserved.
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