Abstract:Thermal management within micro-electro-mechanical systems (MEMS) is one of the key issues to maintain desired device operation. However, Fourier heat transportation mechanism is no longer valid when the device scale gets smaller since the rarefaction effect should be considered. While non-Fourier heat transfer (the cold-to-hot heat flux) is dominant within low-speed non-oscillatory lid-driven cavity, the oscillation affects the heat transportation mechanism inside the cavity by enhancement of Fourier heat transfer. Thus, the oscillating cavity could be a suitable test case, which is expected to illustrate both Fourier and non-Fourier heat transportation mechanism at the same time. Thermal transportation inside the oscillating cavity is investigated using unified gas kinetic scheme (UGKS), which is a kinetic equation based multiscale solver from the continuum to the free molecular regime. In comparison with particle-based direct simulation Monte Carlo (DSMC) method, the UGKS has two distinct advantages (1) the cell size and the time step are not limited by the particle mean free path and mean collision time, (2) no statistical noise is observed, especially for low-speed flows. Since the heat flux using UGKS utilizes microscopic gas distribution function in the discretized velocity space, it enables to capture complex thermal transportation mechanism, which coexists the Fourier and the non-Fourier heat flux, and it is compared with the heat flux from constitutive relations including Navier-Stokes-Fourier and augmented Burnett equations over different flow regimes.Thermal management within micro-electro-mechanical systems (MEMS) is one of the key issues to maintain desired device operation. However, Fourier heat transportation mechanism is no longer valid when the device scale gets smaller since the rarefaction effect should be considered. While non-Fourier heat transfer (the cold-to-hot heat flux) is dominant within low-speed non-oscillatory lid-driven cavity, the oscillation affects the heat transportation mechanism inside the cavity by enhancement of Fourier heat transfer. Thus, the oscillating cavity could be a suitable test case, which is expected to illustrate both Fourier and non-Fourier heat transportation mechanism at the same time. Thermal transportation inside the oscillating cavity is investigated using unified gas kinetic scheme (UGKS), which is a kinetic equation based multiscale solver from the continuum to the free molecular regime. In comparison with particle-based direct simulation Monte Carlo (DSMC) method, the UGKS has two distinct advantages (1) the cell size and the time step are not limited by the particle mean free path and mean collision time, (2) no statistical noise is observed, especially for low-speed flows. Since the heat flux using UGKS utilizes microscopic gas distribution function in the discretized velocity space, it enables to capture complex thermal transportation mechanism, which coexists the Fourier and the non-Fourier heat flux, and it is compared with the heat flux from constitutive relations including Navier-Stokes-Fourier and augmented Burnett equations over different flow regimes.

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