Magnetic properties and high frequency characteristics of sputtered FeAl and FeAlB

C C Hsieh,M Y Jian,H W Chang,X G Zhao,W C Chang
DOI: https://doi.org/10.1088/1742-6596/266/1/012031
2011-01-01
Journal of Physics: Conference Series
Abstract:The magnetic properties and high frequency characteristics of sputtered Fe81Al19 and Fe81Al10B9 thin films have been investigated. The above two thin films were sputtered at different oblique deposition angles in order to induce magnetic anisotropy in the film. The saturation magnetization of the films is easily above 12 kG, while the coercivity and the magnetic anisotropy field of the films are increased with increasing the oblique deposition angle, and decreased for the film with B. The residue stress induced by the oblique deposition is presumed the main factor to influence the magnetic anisotropy field of the thin films, the larger the residue stress the higher the magnetic anisotropy field and ferromagnetic-resonance frequency. The ferromagnetic-resonance frequency of Fe81Al10B9 films can be above 1.3 GHz, while the permeability of the films is as high as 300–750 in the frequency range of 0–1 GHz, depending on the oblique deposition angles.
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