Model Predictive Temperature Control of a Distribution System for Chemicals

S. Koch,M. Ponikvar,M. Steinberger,M. Horn
DOI: https://doi.org/10.1007/978-3-319-43080-5_12
2016-11-12
Abstract:In semiconductor manufacturing tight temperature control of chemicals is crucial for meeting clean application requirements. The use of multiple chemistries as well as various configuration options makes precise temperature control a challenging task. In this paper a generic solution for the temperature control in a single wafer manufacturing machinery for wet-chemical processing based on a model predictive control technique is presented. The developed control strategy is implemented and evaluated on a real world unit with realistic wafer cleaning recipes.
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